Time-dependent measurement of charge density on the bottom of high aspect capillary hole in pulse-modulated VHF capacitively coupled Ar plasma
Moriyama, Makoto, Nakahara, Naoya, Kurihara, Kazuaki, Iino, Daiki, Fukumizu, Hiroyuki, Suzuki, Haruka, Toyoda, Hirotaka
Published in Japanese Journal of Applied Physics (01.01.2021)
Published in Japanese Journal of Applied Physics (01.01.2021)
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Journal Article
Angular distribution measurement of high-energy argon neutral and ion in a 13.56 MHz capacitively-coupled plasma
Ichikawa, Keita, Chu, Manh Hung, Moriyama, Makoto, Nakahara, Naoya, Suzuki, Haruka, Iino, Daiki, Fukumizu, Hiroyuki, Kurihara, Kazuaki, Toyoda, Hirotaka
Published in Applied physics express (01.12.2021)
Published in Applied physics express (01.12.2021)
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Journal Article
Evaluation of absolute charge density at the bottom of high aspect capillary holes exposed to a pulsed very high frequency plasma
Moriyama, Makoto, Nakahara, Naoya, Mitsuya, Akihiro, Suzuki, Haruka, Kurihara, Kazuaki, Iino, Daiki, Fukumizu, Hiroyuki, Toyoda, Hirotaka
Published in Japanese Journal of Applied Physics (01.06.2020)
Published in Japanese Journal of Applied Physics (01.06.2020)
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Journal Article
Effective Species in Inductively Coupled Nitrogen Plasma for Silicon Nitriding
Horikawa, Yoshimine, Kurihara, Kazuaki, Sasaki, Koichi
Published in Applied physics express (01.08.2011)
Published in Applied physics express (01.08.2011)
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Journal Article
High-strain piezoelectric ceramics and applications to actuators
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Journal Article
Conference Proceeding
Rotating Symmetrical Piezoelectric Microactuators for Magnetic Head Drives
Kurihara, Kazuaki, Hida, Masaharu, Umemiya, Shigeyoshi, Kondo, Masao, Koganezawa, Shinji
Published in Japanese Journal of Applied Physics (01.09.2006)
Published in Japanese Journal of Applied Physics (01.09.2006)
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Journal Article
Design of a mechanical tuning for superconducting microwave power filters
YAMANAKA, Kazunori, KURIHARA, Kazuaki, AKASEGAWA, Akihiko, KONDO, Masao
Published in Journal of superconductivity and novel magnetism (01.01.2007)
Published in Journal of superconductivity and novel magnetism (01.01.2007)
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Conference Proceeding
Journal Article