Microfabrication: LIGA-X and applications
Kupka, R.K., Bouamrane, F., Cremers, C., Megtert, S.
Published in Applied surface science (01.09.2000)
Published in Applied surface science (01.09.2000)
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Journal Article
Conference Proceeding
Resist dissolution rate and inclined-wall structures in deep x-ray lithography
Liu, Z, Bouamrane, F, Roulliay, M, Kupka, R K, Labèque, A, Megtert, S
Published in Journal of micromechanics and microengineering (01.12.1998)
Published in Journal of micromechanics and microengineering (01.12.1998)
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Journal Article
Analysis of the near field image formation of dielectric gratings
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Journal Article
Conference Proceeding
Fabrication of quantum wires and dots by X-ray lithography and Ga + implantation enhanced intermixing
Kupka, R.K., Chen, Y., Planel, R., Launois, H.
Published in Microelectronic engineering (01.02.1995)
Published in Microelectronic engineering (01.02.1995)
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Journal Article
Conference Proceeding
Proximity X-ray lithography as a quick replication technique in nanofabrication: Recent progress and perspectives
Chen, Y., Rousseaux, F., Haghiri-Gosnet, A.M., Kupka, R.K., Ravet, M.F., Simon, G., Launois, H.
Published in Microelectronic engineering (01.01.1996)
Published in Microelectronic engineering (01.01.1996)
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Journal Article
Conference Proceeding
Replication of very small periodic gratings with proximity x-ray lithography
Chen, Y., Kupka, R.K., Rousseaux, F., Ravet, M.F., Carcenac, F., Madouri, A., Launois, H.
Published in Microelectronic engineering (1994)
Published in Microelectronic engineering (1994)
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Journal Article