Application of resist-profile-aware source optimization in 28 nm full chip optical proximity correction
Zhu, Jun, Zhang, David Wei, Kuo, Chinte, Wang, Qing, Wei, Fang, Zhang, Chenming, Chen, Han, He, Daquan, Hsu, Stephen D.
Published in Journal of semiconductors (01.07.2017)
Published in Journal of semiconductors (01.07.2017)
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Journal Article
The research of 28nm NMOS TEM sample junction stain analysis
Chen Sheng, Shi Yanping, Chen Qiang, Chinte Kuo
Published in 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (01.07.2017)
Published in 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (01.07.2017)
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Conference Proceeding
Resistance Decay of Cu/Porous Low- Interconnect: Modeling and its Impact on Electromigration
Zheng, Hui, Yin, Bin. F., Chen, Lei G., Zhou, Ke, Kuo, Chinte
Published in IEEE transactions on electron devices (01.04.2018)
Published in IEEE transactions on electron devices (01.04.2018)
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Journal Article
Front-plane and Back-plane Bias Temperature Instability of 22 nm Gate-last FDSOI MOSFETs
Wang, Yang, Wang, Chen, Chen, Tao, Liu, Hao, Kuo, Chinte, Zhou, Ke, Yin, Binfeng, Chen, Lin, Sun, Qing-Qing
Published in 2020 IEEE International Reliability Physics Symposium (IRPS) (01.04.2020)
Published in 2020 IEEE International Reliability Physics Symposium (IRPS) (01.04.2020)
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Conference Proceeding
Subtle gate oxide defect elimination to improve the reliability of a 32M-bit SRAM product
Kuo, Chinte, Wei Zhang, David, Wei, Wen, Chen, Frank, Pang, Albert
Published in Materials science in semiconductor processing (01.01.2016)
Published in Materials science in semiconductor processing (01.01.2016)
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Journal Article
Changeable electromigration failure mode in wide Cu interconnects
Zheng, Hui, Yin, Binfeng, Chen, Leigang, Zhou, Ke, Kuo, Chinte
Published in 2018 China Semiconductor Technology International Conference (CSTIC) (01.03.2018)
Published in 2018 China Semiconductor Technology International Conference (CSTIC) (01.03.2018)
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Conference Proceeding