11.5: A MEMS-based vacuum gauge for measuring pressure and out-gassing rates in miniaturized vacuum microelectronic devices
Chang, J, Jayapratha, N, Kuljic, R, Salvador, B, Cantwell, M, Broughton, K, Kunzer, B, Po Keong Ng, Selner, A, Razo, R, Harris, M, Qilu He, Syerov, S, Harry, D, Kanneganti, S, Benison, A, Edlavitch, B, Dankovic, T, Banerjee, K, Feinerman, A, Busta, H
Published in International Vacuum Nanoelectronics Conference (01.07.2010)
Published in International Vacuum Nanoelectronics Conference (01.07.2010)
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