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Year of Publication 01.06.2023
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Year of Publication 01.06.2023
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ENHANCED OXIDATION WITH HYDROGEN RADICAL PRETREATMENT
Tam, Norman, Sharma, Shashank, Spuller, Matthew, Kumar, Pradeep Sampath
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Year of Publication 22.09.2022
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TREATMENT METHODS FOR SILICON NANOSHEET SURFACES
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Year of Publication 15.02.2024
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Year of Publication 15.02.2024
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IMPURITY REDUCTION IN RADICAL TREATMENT CHAMBER
TRAN, Eric T, SHARMA, Shashank, RAMAKRISHNA, Mahesh, KAMP, Michael P, SAMPATH KUMAR, Pradeep, TAM, Norman L, CALDERON, Victor, IU, Dongming, RIESKE, Eric R, XIA, Edward T
Year of Publication 29.08.2024
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Year of Publication 29.08.2024
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Enhanced oxidation with hydrogen radical pretreatment
KUMAR, PRADEEP SAMPATH, TAM, NORMAN, SPULLER, MATTHEW, SHARMA, SHASHANK
Year of Publication 01.01.2023
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Year of Publication 01.01.2023
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Silicon nanosheet surface treatment method
TAM NORMAN L, KUMAR PRADEEP SAMPATH, LENG JINGMIN, CALDERON VICTOR, RAMAKRISHNAN, MAHESH, JIANG ZHIMING, SHARMA SHASHANK
Year of Publication 23.02.2024
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Year of Publication 23.02.2024
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Treatment methods for silicon nanosheet surfaces
SAMPATH KUMAR, PRADEEP, JIANG, ZHIMING, TAM, NORMAN L, SHARMA, SHASHANK, RAMAKRISHNA, MAHESH, CALDERON, VICTOR, LENG, JINGMIN
Year of Publication 16.02.2024
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Year of Publication 16.02.2024
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Methods, systems, and apparatus for radical treatment operations prior to annealing operations
TAM NORMAN L, RIESKE ERIC R, KARP MICHAEL P, KUMAR PRADEEP SAMPATH, IU DONGMING, SHARMA SHASHANK
Year of Publication 14.06.2024
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Year of Publication 14.06.2024
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