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"Kugimoto, Hironori"
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정전 척 부재, 정전 척 장치, 및 정전 척 부재의 제조 방법
by
YOSHIOKA YOSHIKI
,
KUGIMOTO HIRONORI
,
TAKAHASHI KENTARO
Year of Publication
24.09.2024
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정전 척 장치
by
KUGIMOTO HIRONORI
Year of Publication
17.11.2017
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정전 척 장치 및 정전 척 장치의 제조 방법
by
MORISHITA NORITO
,
KUGIMOTO HIRONORI
Year of Publication
30.11.2020
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ELECTROSTATIC CHUCK DEVICE AND METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK DEVICE
by
HIDAKA NOBUHIRO
,
KUGIMOTO HIRONORI
,
KOSAKAI MAMORU
Year of Publication
22.12.2023
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ELECTROSTATIC CHUCK MEMBER, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK MEMBER
by
TAKAHASHI Kentaro
,
KUGIMOTO Hironori
,
YOSHIOKA Yoshiki
Year of Publication
21.09.2023
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복합 소결체, 정전 척 부재 및 정전 척 장치
by
HIDAKA NOBUHIRO
,
KUGIMOTO HIRONORI
Year of Publication
02.03.2020
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ELECTROSTATIC CHUCK DEVICE
by
KUGIMOTO Hironori
Year of Publication
15.09.2016
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복합 소결체, 정전 척 부재, 및 정전 척 장치
by
HIDAKA NOBUHIRO
,
KUGIMOTO HIRONORI
Year of Publication
09.12.2019
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ELECTROSTATIC CHUCK DEVICE AND PRODUCTION METHOD FOR ELECTROSTATIC CHUCK DEVICE
by
MORISHITA Norito
,
KUGIMOTO Hironori
Year of Publication
26.09.2019
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COMPOSITE SINTERED BODY, ELECTROSTATIC CHUCK MEMBER, AND ELECTROSTATIC CHUCK DEVICE
by
HIDAKA Nobuhiro
,
KUGIMOTO Hironori
Year of Publication
03.01.2019
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COMPOSITE SINTERED BODY, ELECTROSTATIC CHUCK MEMBER, AND ELECTROSTATIC CHUCK DEVICE
by
HIDAKA Nobuhiro
,
KUGIMOTO Hironori
Year of Publication
30.08.2018
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세라믹스 접합체, 정전 척 장치, 세라믹스 접합체의 제조 방법
by
HIDAKA NOBUHIRO
,
KUGIMOTO HIRONORI
,
MIURA YUKIO
,
ARIKAWA JUN
Year of Publication
07.10.2022
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세라믹스 접합체, 정전 척 장치, 세라믹스 접합체의 제조 방법
by
HIDAKA NOBUHIRO
,
KUGIMOTO HIRONORI
,
MIURA YUKIO
,
ARIKAWA JUN
Year of Publication
07.10.2022
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CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY
by
MIURA Yukio
,
ARIKAWA Jun
,
HIDAKA Nobuhiro
,
KUGIMOTO Hironori
Year of Publication
05.08.2021
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CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY
by
MIURA Yukio
,
ARIKAWA Jun
,
HIDAKA Nobuhiro
,
KUGIMOTO Hironori
Year of Publication
05.08.2021
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세라믹스 기체 및 서셉터
by
HIDAKA NOBUHIRO
,
KIMURA NAOTO
,
KUGIMOTO HIRONORI
,
KOSAKAI MAMORU
Year of Publication
08.12.2020
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정전 척 장치 및 정전 척 장치의 제조 방법
by
WATANABE TAKESHI
,
OZAKI MASAKI
,
KUGIMOTO HIRONORI
,
TAKAHASHI KENTARO
Year of Publication
26.10.2020
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세라믹스 재료, 정전 척 장치
by
HIDAKA NOBUHIRO
,
YOSHIOKA YOSHIKI
,
KUGIMOTO HIRONORI
Year of Publication
04.10.2018
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정전 척 장치 및 정전 척 장치의 제조 방법
by
HIDAKA NOBUHIRO
,
KUGIMOTO HIRONORI
,
KOSAKAI MAMORU
Year of Publication
12.09.2018
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CERAMIC SUBSTRATE AND SUSCEPTOR
by
KIMURA Naoto
,
KOSAKAI Mamoru
,
HIDAKA Nobuhiro
,
KUGIMOTO Hironori
Year of Publication
03.10.2019
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