EUV EUV EXPOSURE APPARATUS
HAUF MARKUS, WALTER HOLGER, HEMBACHER STEFAN, LOERING ULRICH, LAUFER TIMO, BAER NORMAN, KWAN YIM BUN PATRICK, VAN SCHOOT JAN, NATT OLIVER, WITTICH GERO, STICKEL FRANZ JOSEF, KUERZ PETER, LIMBACH GUIDO
Year of Publication 05.09.2018
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Year of Publication 05.09.2018
Patent
EUV EUV EXPOSURE APPARATUS
HAUF MARKUS, WALTER HOLGER, HEMBACHER STEFAN, LOERING ULRICH, LAUFER TIMO, BAER NORMAN, KWAN YIM BUN PATRICK, VAN SCHOOT JAN, NATT OLIVER, WITTICH GERO, STICKEL FRANZ JOSEF, KUERZ PETER, LIMBACH GUIDO
Year of Publication 29.08.2013
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Year of Publication 29.08.2013
Patent
Flüssigkeits‐assoziierte Hautschäden (FAH): Eine Best Practice Empfehlung von Wund‐D.A.CH
Dissemond, Joachim, Assenheimer, Bernd, Gerber, Veronika, Hintner, Marianne, Magareta Jukic Puntigam, Kolbig, Norbert, Koller, Sonja, Kurz, Peter, Läuchli, Severin, Probst, Sebastian, Protz, Kerstin, Steiniger, Alfred, Strohal, Robert, Traber, Jürg, Kottner, Jan
Published in Journal der Deutschen Dermatologischen Gesellschaft (01.06.2021)
Published in Journal der Deutschen Dermatologischen Gesellschaft (01.06.2021)
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Journal Article
EUV EXPOSURE APPARATUS
KUERZ, Peter, LIMBACH, Guido, NATT, Oliver, VAN SCHOOT, Jan, WITTICH, Gero, LOERING, Ulrich, LAUFER, Timo, HEMBACHER, Stefan, HAUF, Markus, BAER, Norman, WALTER, Holger, KWAN, Yim-Bun-Patrick, STICKEL, Franz-Josef
Year of Publication 01.07.2020
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Year of Publication 01.07.2020
Patent
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
Stickel, Franz-Josef, Hauf, Markus, Baer, Norman, Laufer, Timo, Wittich, Gero, Van Schoot, Jan, Limbach, Guido, Kwan, Yim-Bun-Patrick, Loering, Ulrich, Natt, Oliver, Hembacher, Stefan, Kuerz, Peter, Walter, Holger
Year of Publication 16.06.2020
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Year of Publication 16.06.2020
Patent
EUV EXPOSURE APPARATUS
KUERZ, Peter, LIMBACH, Guido, NATT, Oliver, VAN SCHOOT, Jan, WITTICH, Gero, LOERING, Ulrich, LAUFER, Timo, HEMBACHER, Stefan, HAUF, Markus, BAER, Norman, WALTER, Holger, KWAN, Yim-Bun-Patrick, STICKEL, Franz-Josef
Year of Publication 29.04.2020
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Year of Publication 29.04.2020
Patent
EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFLUENCE OF TEMPERATURE VARIATION
Stickel, Franz-Josef, Hauf, Markus, Baer, Norman, Laufer, Timo, Wittich, Gero, Van Schoot, Jan, Limbach, Guido, Kwan, Yim-Bun-Patrick, Loering, Ulrich, Natt, Oliver, Hembacher, Stefan, Kuerz, Peter, Walter, Holger
Year of Publication 10.10.2019
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Year of Publication 10.10.2019
Patent
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
Stickel, Franz-Josef, Hauf, Markus, Baer, Norman, Laufer, Timo, Wittich, Gero, Van Schoot, Jan, Limbach, Guido, Kwan, Yim-Bun-Patrick, Loering, Ulrich, Natt, Oliver, Hembacher, Stefan, Kuerz, Peter, Walter, Holger
Year of Publication 11.06.2019
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Year of Publication 11.06.2019
Patent
Journal der Deutschen Dermatologischen Gesellschaft = Journal of the German Society of Dermatology : JDDG
Dissemond, Joachim, Assenheimer, Bernd, Gerber, Veronika, Hintner, Marianne, Puntigam, Magareta Jukic, Kolbig, Norbert, Koller, Sonja, Kurz, Peter, Läuchli, Severin, Probst, Sebastian, Protz, Kerstin, Steiniger, Alfred, Strohal, Robert, Traber, Jürg, Kottner, Jan
Published in Journal der Deutschen Dermatologischen Gesellschaft (01.06.2021)
Published in Journal der Deutschen Dermatologischen Gesellschaft (01.06.2021)
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Journal Article
EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFLUENCE OF TEMPERATURE VARIATION
Stickel, Franz-Josef, Hauf, Markus, Baer, Norman, Laufer, Timo, Wittich, Gero, Van Schoot, Jan, Limbach, Guido, Kwan, Yim-Bun-Patrick, Loering, Ulrich, Natt, Oliver, Hembacher, Stefan, Kuerz, Peter, Walter, Holger
Year of Publication 18.10.2018
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Year of Publication 18.10.2018
Patent
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
Stickel, Franz-Josef, Hauf, Markus, Baer, Norman, Laufer, Timo, Wittich, Gero, Van Schoot, Jan, Limbach, Guido, Kwan, Yim-Bun-Patrick, Loering, Ulrich, Natt, Oliver, Hembacher, Stefan, Kuerz, Peter, Walter, Holger
Year of Publication 24.07.2018
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Year of Publication 24.07.2018
Patent
EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFLUENCE OF TEMPERATURE VARIATION
Hembacher Stefan, Wittich Gero, Hauf Markus, Kuerz Peter, Kwan Yim-Bun-Patrick, Limbach Guido, Stickel Franz-Josef, Walter Holger, Baer Norman, Natt Oliver, Loering Ulrich, Laufer Timo, Van Schoot Jan
Year of Publication 02.11.2017
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Year of Publication 02.11.2017
Patent
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
Hembacher Stefan, Wittich Gero, Hauf Markus, Kuerz Peter, Kwan Yim-Bun-Patrick, Limbach Guido, Stickel Franz-Josef, Walter Holger, Baer Norman, Natt Oliver, Loering Ulrich, Laufer Timo, Van Schoot Jan
Year of Publication 29.08.2017
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Year of Publication 29.08.2017
Patent
EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFLUENCE OF TEMPERATURE VARIATION
HAUF MARKUS, WALTER HOLGER, STICKEL FRANZ-JOSEF, HEMBACHER STEFAN, LOERING ULRICH, LAUFER TIMO, BAER NORMAN, KWAN YIM-BUN-PATRICK, VAN SCHOOT JAN, NATT OLIVER, WITTICH GERO, KUERZ PETER, LIMBACH GUIDO
Year of Publication 07.07.2016
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Year of Publication 07.07.2016
Patent
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
HAUF MARKUS, WALTER HOLGER, STICKEL FRANZ-JOSEF, HEMBACHER STEFAN, LOERING ULRICH, LAUFER TIMO, BAER NORMAN, KWAN YIM-BUN-PATRICK, VAN SCHOOT JAN, NATT OLIVER, WITTICH GERO, KUERZ PETER, LIMBACH GUIDO
Year of Publication 19.04.2016
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Year of Publication 19.04.2016
Patent
EUV Exposure Apparatus
HAUF MARKUS, WALTER HOLGER, STICKEL FRANZ-JOSEF, HEMBACHER STEFAN, LOERING ULRICH, LAUFER TIMO, BAER NORMAN, KWAN YIM-BUN-PATRICK, VAN SCHOOT JAN, NATT OLIVER, WITTICH GERO, KUERZ PETER, LIMBACH GUIDO
Year of Publication 06.06.2013
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Year of Publication 06.06.2013
Patent
EUV EXPOSURE APPARATUS
LOERING, ULRICH, WITTICH, GERO, LAUFER, TIMO, HAUF, MARKUS, KWAN, YIM-BUN-PATRICK, STICKEL, FRANZ-JOSEF, BAER, NORMAN, NATT, OLIVER, LIMBACH, GUIDO, WALTER, HOLGER, HEMBACHER, STEFAN, KUERZ, PETER, VAN SCHOOT, JAN
Year of Publication 05.06.2013
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Year of Publication 05.06.2013
Patent