Micropatterning Layers by Flame Aerosol Deposition-Annealing
Tricoli, Antonio, Graf, Markus, Mayer, Felix, Kuühne, Stéphane, Hierlemann, Andreas, Pratsinis, Sotiris E.
Published in Advanced materials (Weinheim) (18.08.2008)
Published in Advanced materials (Weinheim) (18.08.2008)
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Journal Article
Large Stroke Staggered Vertical Comb-Drive Actuator for the Application of a Millimeter-Wave Tunable Phase Shifter
Yunjia Li, Psychogiou, Dimitra, Kuhne, Stephane, Hesselbarth, Jan, Hafner, Christian, Hierold, Christofer
Published in Journal of microelectromechanical systems (01.08.2013)
Published in Journal of microelectromechanical systems (01.08.2013)
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Journal Article