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Fabrication of GaN topological photonic crystal membranes in the visible wavelength region by a combination process of HEATE and AlInN wet etching
by
Yoneta, Koji
,
Abe, Koki
,
Kudou
,
Taiju
,
Kikuchi, Akihiko
Published in
Japanese Journal of Applied Physics
(01.05.2022)
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engineering
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physics
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design parameters
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electrical properties
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etching
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gan
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indium gallium nitrides
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ingan
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English
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Institute of Physics (IOP) Publishing Journals
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