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Published in ECS transactions (07.07.2006)
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Published in ECS transactions (07.07.2006)
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Year of Publication 21.07.2003
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Year of Publication 11.02.2003
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Vertical gate top engineering for improved GC and CB process windows
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Year of Publication 11.02.2003
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VERTICAL GATE TOP ENGINEERING FOR IMPROVED GC AND CB PROCESS WINDOWS
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Year of Publication 31.10.2002
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Vertical gate top engineering for improved GC and CB process windows
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Year of Publication 24.10.2002
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Year of Publication 26.02.2003
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METHOD OF REMOVING RIE LAG IN A DEEP TRENCH SILICON ETCHING STEP
LEE, BRIAN, S, NAEEM, MUNIR, D, KIM, BYEONG, YEOL, MATHAD, GANGADHARA, S, LEE, HEON, RANADE, RAJIV, PARK, YOUNG-JIN, MORALES, ELIZABETH, KUDELKA, STEPHAN, P
Year of Publication 27.06.2002
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Year of Publication 27.06.2002
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METHOD OF REDUCING REACTIVE ION ETCHING LAG IN DEEP- TRENCH SILICON ETCHING
LI HONG, PARK YOUNG-JIN, RANADE RAJIV M, KIM BYEONG YEOL, KUDELKA STEPHAN P, MATHAD GANGADHARA S, NAEEM MUNIR D, MORALES ELIZABETH, LEE BRIAN S
Year of Publication 31.01.2002
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Year of Publication 31.01.2002
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