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Year of Publication 21.12.2023
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Year of Publication 21.12.2023
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Large area high density plasma processing chamber for flat panel display
ANWAR SUHAIL, WU YULUN, SORENSEN CARL A, SEQUEIRA, JEEVAN, PRAKASH, KUDELA JOZEF
Year of Publication 01.03.2022
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Year of Publication 01.03.2022
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LARGE-AREA HIGH-DENSITY PLASMA PROCESSING CHAMBER FOR FLAT PANEL DISPLAYS
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Year of Publication 17.12.2021
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Year of Publication 17.12.2021
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Microwave plasma source with split window
DZILNO, DMITRY A, XIA, YANJUN, CHANDRASEKARAN, SIVA, TANAKA, TSUTOMU, SHERVEGAR, AVINASH, KUDELA, JOZEF, RAMASAMY, BALAMURUGAN, SHAH, KARTIK, TRUONG, QUOC, GARACHTCHENKO, ALEXANDER V
Year of Publication 11.08.2023
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Year of Publication 11.08.2023
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Guided wave applicator with non-gaseous dielectric for plasma chamber
ANWAR SUHAIL, SORENSEN CARL A, TANAKA TSUTOMU, KUDELA JOZEF, WHITE JOHN M
Year of Publication 19.07.2016
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Year of Publication 19.07.2016
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