Bulk-Silicon-Based Waveguides and Bends Fabricated Using Silicon Wet Etching: Properties and Limits
Ku, Bonwoo, Kim, Kyoung-Soo, Kim, Yonghan, Kwon, Min-Suk
Published in Journal of lightwave technology (15.09.2017)
Published in Journal of lightwave technology (15.09.2017)
Get full text
Journal Article