Chromium films deposition by hot target high power pulsed magnetron sputtering: Deposition conditions and film properties
Grudinin, Vladislav A., Bleykher, Galina A., Sidelev, Dmitrii V., Krivobokov, Valery P., Bestetti, Massimiliano, Vicenzo, Antonello, Franz, Silvia
Published in Surface & coatings technology (15.10.2019)
Published in Surface & coatings technology (15.10.2019)
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Journal Article
Hot target magnetron sputtering for ferromagnetic films deposition
Sidelev, Dmitrii V., Bleykher, Galina A., Grudinin, Vladislav A., Krivobokov, Valery P., Bestetti, Massimiliano, Syrtanov, Maxim S., Erofeev, Evgenii V.
Published in Surface & coatings technology (25.01.2018)
Published in Surface & coatings technology (25.01.2018)
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Journal Article
Deposition of Cr films by hot target magnetron sputtering on biased substrates
Sidelev, Dmitrii V., Bestetti, Massimiliano, Bleykher, Galina A., Krivobokov, Valery P., Grudinin, Vladislav A., Franz, Silvia, Vicenzo, Antonello, Shanenkova, Yuliya L.
Published in Surface & coatings technology (25.09.2018)
Published in Surface & coatings technology (25.09.2018)
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Journal Article