Single Particle Inductively Coupled Plasma Mass Spectrometry Study of Ceria Nanoparticle Size Distribution from Oxide CMP with Microreplicated Pads
Zazzera, Larry, Chan, Qilin, Stomberg, Jaimie, Simpson, Alexander, Loesch, Chris, LeHuu, Duy, Muradian, David, Lagudu, Uma Rames Krishna, Mader, Brian
Published in ECS journal of solid state science and technology (01.03.2021)
Published in ECS journal of solid state science and technology (01.03.2021)
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Journal Article
Effect of Transition Metal Compounds on Amorphous SiC Removal Rates
Lagudu, Uma Rames Krishna, Babu, S. V.
Published in ECS journal of solid state science and technology (01.01.2014)
Published in ECS journal of solid state science and technology (01.01.2014)
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Journal Article
Development of Post-CMP Cleaners for Better Defect Performance
Tran, Cuong, Zhang, Peng, Sun, Laisheng, Penta, Naresh K., Lagudu, Uma Rames K., Shipp, Devon, Babu, S.V
Published in ECS transactions (16.03.2012)
Published in ECS transactions (16.03.2012)
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Journal Article
Laminates for Cleaning Substrate Surfaces and Methods of Use Thereof
Kolb, William Blake, Nelson, Eric W, Coonce, Benjamin R, Lagudu, Uma Rames Krishna, Priolo, Morgan A
Year of Publication 04.04.2024
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Year of Publication 04.04.2024
Patent
PAD CONDITIONING BRUSH
HOBBS, Terry, DWORSHAK, Jeremy, JAVID, Samad, ALEXANDER, Stephen, LUECK, Brian, LAGUDU, Uma Rames Krishna
Year of Publication 06.07.2023
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Year of Publication 06.07.2023
Patent
LAMINATES FOR CLEANING SUBSTRATE SURFACES AND METHODS OF USE THEREOF
PRIOLO, Morgan A, NELSON, Eric W, LAGUDU, Uma Rames Krishna, COONCE, Benjamin R, KOLB, William Blake
Year of Publication 09.06.2022
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Year of Publication 09.06.2022
Patent
Pad conditioning brush
LAGUDU, UMA RAMES KRISHNA, ALEXANDER, STEPHEN ROBERT, DWORSHAK, JEREMY KENNETH, HOBBS, TERRY RICHARD, LUECK, BRIAN WILLIAM, JAVID, SAMAD
Year of Publication 16.11.2023
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Year of Publication 16.11.2023
Patent
Laminates for cleaning substrate surfaces and methods of use thereof
LAGUDU, UMA RAMES KRISHNA, PRIOLO, MORGAN ALEXANDER, COONCE, BENJAMIN RYAN, KOLB, WILLIAM BLAKE, NELSON, ERIC WAYNE
Year of Publication 16.09.2022
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Year of Publication 16.09.2022
Patent
Tunable Polish Rates By Varying Dissolved Oxygen Content
LAGUDU UMA RAMES KRISHNA, PENTA NARESH K, DANDU P.R. VEERA, SURYADEVARA BABU V
Year of Publication 09.10.2014
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Year of Publication 09.10.2014
Patent
Tunable polish rates by varying dissolved oxygen content
DANDU P. R. VEERA, LAGUDU UMA RAMES KRISHNA, PENTA NARESH K, SURYADEVARA BABU V
Year of Publication 15.07.2014
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Year of Publication 15.07.2014
Patent
Tunable Polish Rates By Varying Dissolved Oxygen Content
LAGUDU UMA RAMES KRISHNA, PENTA NARESH K, DANDU P.R. VEERA, SURYADEVARA BABU V
Year of Publication 01.12.2011
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Year of Publication 01.12.2011
Patent