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Year of Publication 02.01.2024
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LOCAL SHAPE DEVIATION IN A SEMICONDUCTOR SPECIMEN
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Year of Publication 09.03.2023
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TECHNIQUE FOR MEASURING OVERLAY BETWEEN LAYERS OF A MULTILAYER STRUCTURE
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Year of Publication 05.04.2022
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패턴의 임계 치수 변동의 결정
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Year of Publication 14.05.2020
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Year of Publication 14.05.2020
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3 NAND EVALUATING AN INTERMEDIATE PRODUCT RELATED TO A THREE-DIMENSIONAL NAND MEMORY UNIT
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Year of Publication 15.03.2021
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Year of Publication 15.03.2021
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반도체 웨이퍼들 상의 패턴들의 높이 차이의 측정
KHRISTO SERGEY, AVNIEL YAN, LEVI SHIMON, SCHWARZBAND ISHAI, KRIS ROMAN, BARAM MOR, GIRMONSKY DORON
Year of Publication 30.12.2019
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Year of Publication 30.12.2019
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3D-NAND CDSEM 계측을 위한 방법, 시스템, 및 컴퓨터 프로그램 제품
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Year of Publication 14.07.2021
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Year of Publication 14.07.2021
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EVALUATING A HOLE FORMED IN AN INTERMEDIATE PRODUCT
ROGERS DANIEL ALAN, FRISHMAN EINAT, DUVDEVANI BAR SHARON, SHAMIR ASSAF, KLEBANOV GRIGORY, SOMMER ELAD, GEVA JANNELLE ANNA, BEN SIMHON AVI AVIAD, RATHORE DHANANJAY SINGH, KRIS ROMAN, FRIEDLER IDO
Year of Publication 29.06.2021
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Year of Publication 29.06.2021
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Inline detection for FinFET gate poly footing using e-Tilt metrology
Zhang, Xiaoxiao, Karakoy, Mert, Wu, Kejia, Chen, Zhuangfei, Ge, Zhenhua, Krishnan, Navi, Siany, Amit, Levi, Shimon, Schwarzband, Ishai, Kris, Roman
Published in 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.04.2018)
Published in 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.04.2018)
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다층 구조물의 층들 사이의 오버레이를 측정하기 위한 기법
GOLDMAN RAN, ZAUER ITAY, WEINBERG YAKOV, LEVI SHIMON, SCHWARZBAND ISHAI, NOVAK OLGA, RATHORE DHANANJAY SINGH, KRIS ROMAN, ADAN OFER
Year of Publication 28.02.2018
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Year of Publication 28.02.2018
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Determining a critical dimension variation of a pattern
Vereschagin, Vadim, Cohen, Boaz, Kris, Roman, Shkalim, Ariel, Schwarzband, Ishai, Bal, Evgeny
Year of Publication 12.09.2023
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Year of Publication 12.09.2023
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EXAMINATION OF A HOLE FORMED IN A SEMICONDUCTOR SPECIMEN
KEREM, Omer, GOLOV, Asaf, SOMMER, Elad, VERESCHAGIN, Vadim, KLEBANOV, Grigory, BEN-HARUSH, Ilan, BISTRITZER, Rafael, KRIS, Roman
Year of Publication 28.12.2023
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Year of Publication 28.12.2023
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Evaluating an intermediate product related to a three-dimensional NAND memory unit
Vereschagin, Vadim, Sommer, Elad, Kris, Roman, Duvdevani-Bar, Sharon, Shamir, Assaf, Lim, Meng Li Cecilia
Year of Publication 18.10.2022
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Year of Publication 18.10.2022
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Epitaxy metrology in fin field effect transistors
Kris, Roman, Levin, Sahar, Frishman, Einat, Chaudhary, Jitendra Pradipkumar, Alkoken, Ran, Chang, Chih-Chieh
Year of Publication 27.09.2022
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Year of Publication 27.09.2022
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EPITAXY METROLOGY IN FIN FIELD EFFECT TRANSISTORS
FRISHMAN, Einat, CHAUDHARY, Jitendra Pradipkumar, KRIS, Roman, LEVIN, Sahar, ALKOKEN, Ran, CHANG, Chih-Chieh
Year of Publication 18.08.2022
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Year of Publication 18.08.2022
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DETERMINING A CRITICAL DIMENSION VARIATION OF A PATTERN
Vereschagin, Vadim, Cohen, Boaz, Kris, Roman, Shkalim, Ariel, Schwarzband, Ishai, Bal, Evgeny
Year of Publication 23.06.2022
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Year of Publication 23.06.2022
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