Online monitoring of the passivation breakthrough during deep reactive ion etching of silicon using optical plasma emission spectroscopy
Leopold, S, Mueller, L, Kremin, C, Hoffmann, M
Published in Journal of micromechanics and microengineering (01.07.2013)
Published in Journal of micromechanics and microengineering (01.07.2013)
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Journal Article
Conference Proceeding
Black silicon—new functionalities in microsystems
Stubenrauch, M, Fischer, M, Kremin, C, Stoebenau, S, Albrecht, A, Nagel, O
Published in Journal of micromechanics and microengineering (01.06.2006)
Published in Journal of micromechanics and microengineering (01.06.2006)
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Journal Article
Conference Proceeding
Bonding of silicon with filled and unfilled polymers based on black silicon
Stubenrauch, M., Fischer, M., Kremin, C., Hoffmann, M., Müller, J.
Published in Micro & nano letters (01.03.2007)
Published in Micro & nano letters (01.03.2007)
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Journal Article