A Ga 2O 3 passivation technique compatible with GaAs device processing
Hong, M, Passlack, M, Mannaerts, J.P, Harris, T.D, Schnoes, M.L, Opila, R.L, Krautter, H.W
Published in Solid-state electronics (1997)
Published in Solid-state electronics (1997)
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Journal Article
A Ga2O3 passivation technique compatible with GaAs device processing
Hong, M, Passlack, M, Mannaerts, J.P, Harris, T.D, Schnoes, M.L, Opila, R.L, Krautter, H.W
Published in Solid-state electronics (01.04.1997)
Published in Solid-state electronics (01.04.1997)
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Journal Article
Molecular beam deposition of high quality silicon oxide dielectric films
NARESH CHAND, JOHNSON, J. E, OSENBACH, J. W, LIANG, W. C, FELDMAN, L. C, TSANG, W. T, KRAUTTER, H. W, PASSLACK, M, HULL, R, SWAMINATHAN, V
Published in Journal of crystal growth (01.03.1995)
Published in Journal of crystal growth (01.03.1995)
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Journal Article
Novel co-sputtered fluorinated amorphous carbon films for sub-0.25 /spl mu/m low /spl kappa/ damascene multilevel interconnect applications
Zhu, W., Pai, C.S., Bair, H.E., Krautter, H.W., Opila, R.L., Dennis, B.S., Pinczuk, A., Chabal, Y.J., Grundmeier, G., Graebner, J.E., Cheung, K.P., Schilling, F.C., Case, C.B., Liu, R., Jin, S.
Published in International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217) (1998)
Published in International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217) (1998)
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Conference Proceeding
50 nm vertical replacement-gate (VRG) nMOSFETs with ALD HfO/sub 2/ and Al/sub 2/O/sub 3/ gate dielectrics
Hergenrother, J.M., Wilk, G.D., Nigam, T., Klemens, F.P., Monroe, D., Silverman, P.J., Sorsch, T.W., Busch, B., Green, M.L., Baker, M.R., Boone, T., Bude, M.K., Ciampa, N.A., Ferry, E.J., Fiory, A.T., Hillenius, S.J., Jacobson, D.C., Johnson, R.W., Kalavade, P., Keller, R.C., King, C.A., Kornblit, A., Krautter, H.W., Lee, J.T.-C., Mansfield, W.M., Miner, J.F., Morris, M.D., Oh, S.-H., Rosamilia, J.M., Sapjeta, B.J., Short, K., Steiner, K., Muller, D.A., Voyles, P.M., Grazul, J.L., Shero, E.J., Givens, M.E., Pomarede, C., Mazanec, M., Werkhoven, C.
Published in International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224) (2001)
Published in International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224) (2001)
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Conference Proceeding