Plasma Parameters in the Reactor with Simultaneous Magnetron Discharge and Inductive Radio-Frequency Discharge in the Presence of External Magnetic Field
Aleksandrov, A. F., Vavilin, K. V., Kral’kina, E. A., Neklyudova, P. A., Nikonov, A. M., Pavlov, V. B., Airapetov, A. A., Odinokov, V. V., Pavlov, G. Ya, Sologub, V. A.
Published in Journal of communications technology & electronics (01.04.2018)
Published in Journal of communications technology & electronics (01.04.2018)
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Journal Article
Plasma-chemical deposition of diamond-like coatings in capacitively coupled RF plasma in toluene
Zadiriev, I I, Nikonov, A M, Kralkina, E A, Vavilin, K V
Published in Journal of physics. Conference series (01.12.2022)
Published in Journal of physics. Conference series (01.12.2022)
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Journal Article
Properties of a low-pressure inductive RF discharge I: Experiment
Aleksandrov, A. F., Vavilin, K. V., Kral’kina, E. A., Pavlov, V. B., Rukhadze, A. A.
Published in Plasma physics reports (01.09.2007)
Published in Plasma physics reports (01.09.2007)
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Journal Article
Pulsed Inductive RF Discharge as an Effective Working Process of an RF Ion Source
Zadiriev, I. I., Kralkina, E. A., Vavilin, K. V., Nikonov, A. M., Shvidkiy, G. V.
Published in Plasma physics reports (01.11.2023)
Published in Plasma physics reports (01.11.2023)
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Journal Article
Physical Features of the Particle Flow Created by a Low-Power Helicon Plasma Source
Zadiriev, I. I., Vavilin, K. V., Kralkina, E. A., Nikonov, A. M., Shvydky, G. V.
Published in Plasma physics reports (01.09.2022)
Published in Plasma physics reports (01.09.2022)
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Journal Article
Properties of a low-pressure inductive RF discharge II: Mathematical simulations
Aleksandrov, A. F., Vavilin, K. V., Kral’kina, E. A., Pavlov, V. B., Rukhadze, A. A.
Published in Plasma physics reports (01.09.2007)
Published in Plasma physics reports (01.09.2007)
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Journal Article
Experimental study of patterns of energy input into hybrid low pressure discharge for varying RF generator power and argon pressure
Alexandrov, A. F., Vavilin, K. V., Kral’kina, E. A., Pavlov, V. B., Rukhadze, A. A., Savinov, V. P., Zhao, Chen, Yakunin, V. G.
Published in Moscow University physics bulletin (01.08.2010)
Published in Moscow University physics bulletin (01.08.2010)
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Journal Article
Features of RF low-pressure discharge with inductive and capacitive channels
Kralkina, E A, Nekliudova, P A, Pavlov, V B, Petrov, A K, Vavilin, K V
Published in Plasma sources science & technology (29.03.2017)
Published in Plasma sources science & technology (29.03.2017)
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Journal Article
RF power absorption by plasma of a low-pressure inductive discharge
Kralkina, E A, Rukhadze, A A, Pavlov, V B, Vavilin, K V, Nekliudova, P A, Petrov, A K, Alexandrov, A F
Published in Plasma sources science & technology (01.02.2016)
Published in Plasma sources science & technology (01.02.2016)
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Journal Article
Hybrid plasma system for magnetron deposition of coatings with ion assistance
Vavilin, K V, Kralkina, E A, Nekludova, P A, Petrov, A. K, Nikonov, A M, Pavlov, V B, Airapetov, A A, Odinokov, V V, Pavlov, G Ya, Sologub, V A
Published in Journal of physics. Conference series (14.01.2016)
Published in Journal of physics. Conference series (14.01.2016)
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