임피던스 매칭 시스템의 무선 주파수 신호 생성기 기반 제어 시스템들 및 방법들
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Year of Publication 07.07.2023
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Year of Publication 07.07.2023
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기판에 걸친 플라즈마 프로세스 결과들의 균일도를 제어하기 위해 바이어스 무선 주파수 공급부에서 저 주파수 고조파의 사용을 위한 시스템들 및 방법들
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Year of Publication 30.03.2023
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Year of Publication 30.03.2023
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플라즈마 프로세싱 시스템의 무선 주파수 (radiofrequency) 공급 시스템으로부터 프로세스 제어 정보를 추출하기 위한 시스템들 및 방법들
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Year of Publication 10.03.2023
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복수의 생성기들 및 위상 제어를 사용하는 이온 에너지 전달을 위한 프로세스 제어
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Year of Publication 07.03.2023
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HF RF 생성기와 연관된 반사 전력을 효율적으로 감소시키기 위한 시스템 및 방법
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Year of Publication 24.09.2024
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튜닝 가능 에지 시스 (TUNABLE EDGE SHEATH) 시스템에서 반사된 전력 최소화
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Year of Publication 08.11.2022
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Year of Publication 08.11.2022
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튜닝 가능 에지 시스 (TUNABLE EDGE SHEATH) 시스템을 위한 펄싱된 RF 신호의 전압 설정점 튜닝
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Year of Publication 08.11.2022
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Year of Publication 08.11.2022
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RING STRUCTURES AND SYSTEMS FOR USE WITHIN PLASMA CHAMBERS
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Year of Publication 23.04.2024
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Year of Publication 23.04.2024
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RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER
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Year of Publication 16.04.2024
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Year of Publication 16.04.2024
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ELECTROSTATIC CHUCK DESIGN FOR COOLING-GAS LIGHT-UP PREVENTION
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Year of Publication 09.04.2024
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Year of Publication 09.04.2024
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RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER
MACE ADAM, MARAKHTANOV ALEXEI, HOLLAND JOHN, KELLOGG MICHAEL C, MATYUSHKIN ALEXANDER, CHEN ZHIGANG, KOZAKEVICH FELIX
Year of Publication 05.04.2024
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Year of Publication 05.04.2024
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RING STRUCTURES AND SYSTEMS FOR USE IN PLASMA CHAMBER
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Year of Publication 26.12.2023
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Year of Publication 26.12.2023
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균일성을 달성하기 위한 듀티 사이클 제어
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Year of Publication 19.09.2023
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Year of Publication 19.09.2023
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전극들에 제공된 RF 신호들 사이의 위상차를 결정하기 위한 시스템들 및 방법들
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Year of Publication 21.06.2024
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Year of Publication 21.06.2024
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RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER
MACE ADAM, MARAKHTANOV ALEXEI, HOLLAND JOHN, KELLOGG MICHAEL C, MATYUSHKIN ALEXANDER, CHEN ZHIGANG, KOZAKEVICH FELIX
Year of Publication 07.03.2023
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Year of Publication 07.03.2023
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플라즈마 시스 (sheath) 특성을 제어하기 위한 시스템들 및 방법들
MARAKHTANOV ALEXEI M, JI BING, HOLLAND JOHN PATRICK, CARON JAMES EUGENE, KOZAKEVICH FELIX LEIB, BHOWMICK RANADEEP
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Year of Publication 04.12.2023
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저주파수 사이클 동안 전력을 상승시키기 위해 비닝 (BINNING) 을 사용하는 시스템들 및 방법들
MARAKHTANOV ALEXEI, HOLLAND JOHN, JI BING, KOZAKEVICH FELIX LEIB, BHOWMICK RANADEEP
Year of Publication 25.10.2022
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Year of Publication 25.10.2022
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세장형 (elongated) RF 스트랩을 갖는 임피던스 매칭부
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Year of Publication 05.10.2022
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Year of Publication 05.10.2022
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