Ring structures and systems for use in plasma chambers
MAYES, ADAM, MARAKHTANOV ALEXEI, MACHUSHKIN, ALEXANDER, HOLLAND JOHN, KELLOGG MICHAEL C, KOZAKEVICH, FELIX, CHEN ZHIGANG
Year of Publication 13.10.2023
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Year of Publication 13.10.2023
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Electrostatic chuck design for cooling-gas light-up prevention
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Year of Publication 25.09.2018
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Year of Publication 25.09.2018
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Multi regime plasma wafer processing to increase directionality of ions
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Year of Publication 19.06.2018
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Year of Publication 19.06.2018
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Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge rf generators
LUCCHESI, KENNETH, ZHAO, LIN, HOLLAND, JOHN PATRICK, MARAKHTANOV, ALEXEI, CHEN, ZHIGANG, KOZAKEVICH, FELIX, KELLOGG, MICHAEL C
Year of Publication 21.04.2023
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Year of Publication 21.04.2023
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Ring structures and systems for use in plasma chambers
MACE ADAM, MACHUSHKIN ALEKSANDR ALEKSANDROVICH, MARAKHTANOV ALEXEI, HOLLAND JOHN, KELLOGG MICHAEL C, CHEN ZHIGANG, KOZAKEVICH FELIX
Year of Publication 07.04.2023
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Year of Publication 07.04.2023
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Ring structures and systems for use in a plasma chamber
MARAKHTANOV, ALEXEI, CHEN, ZHIGANG, MACE, ADAM, KOZAKEVICH, FELIX, MATYUSHKIN, ALEXANDER, HOLLAND, JOHN, KELLOGG, MICHAEL C
Year of Publication 01.02.2023
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Year of Publication 01.02.2023
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High Speed Synchronization Of Plasma Source/Bias Power Delivery
BURRY, Aaron M, KOZAKEVICH, Felix Leib, GITLIN, Benjamin J, FISK, II, Larry J, HOLLAND, John, OLDZIEJ, Mariusz, JI, Bing, BHOWMICK, Ranadeep, SMYKA, Jonathan W, MARAKHTANOV, Alexei, RADOMSKI, Aaron T
Year of Publication 31.12.2020
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Year of Publication 31.12.2020
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HIGH SPEED SYNCHRONIZATION OF PLASMA SOURCE/BIAS POWER DELIVERY
BURRY, Aaron M, KOZAKEVICH, Felix Leib, GITLIN, Benjamin J, HOLLAND, John, OLDZIEJ, Mariusz, JI, Bing, BHOWMICK, Ranadeep, SMYKA, Jonathan W, MARAKHTANOV, Alexei, RADOMSKI, Aaron T, FISK, Larry J
Year of Publication 30.12.2020
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Year of Publication 30.12.2020
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SYSTEMS AND METHODS FOR ACHIEVING A PRE-DETERMINED FACTOR ASSOCIATED WITH AN EDGE REGION WITHIN A PLASMA CHAMBER BY SYNCHRONIZING MAIN AND EDGE RF GENERATORS
Lucchesi Kenneth, Kozakevich Felix, Zhao Lin, Kellogg Michael C, Chen Zhigang, Marakhtanov Alexei, Holland John Patrick
Year of Publication 25.01.2018
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Year of Publication 25.01.2018
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System and method for increasing power using partitions during low frequency periods
MARAKHTANOV ALEXEI, KOZAKEVICH, FELIX, LEIB, HOLLAND JOHN, BHOWMICK, RANADEEP, JI BING
Year of Publication 16.12.2022
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Year of Publication 16.12.2022
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Ring structures and systems for use in a plasma chamber
MARAKHTANOV, ALEXEI, CHEN, ZHIGANG, MACE, ADAM, KOZAKEVICH, FELIX, MATYUSHKIN, ALEXANDER, HOLLAND, JOHN, KELLOGG, MICHAEL C
Year of Publication 11.10.2022
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Year of Publication 11.10.2022
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Radio frequency signal filter device of plasma processing system
MARAKHTANOV ALEXEI, HOLLAND JOHANN, KOZAKEVICH, FELIX, BHOWMICK, RANADEEP, JI BING
Year of Publication 30.09.2022
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Year of Publication 30.09.2022
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Optimization of radio frequency signal ground loop in plasma processing system
MARAKHTANOV ALEXEI, LUCCHESI KENNETH, HOLLAND JOHANN, KOZAKEVICH, FELIX, BHOWMICK, RANADEEP, JI BING
Year of Publication 13.09.2022
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Year of Publication 13.09.2022
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