Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques
Zehetner, J., Vanko, G., Izsak, T., Kovcova, E., Drzik, M., Dohnal, F., Kromka, A.
Published in 2022 14th International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM) (23.10.2022)
Published in 2022 14th International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM) (23.10.2022)
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