High Spatial Resolution and Wide Range EDS Analysis with FE-SEM
Takeuchi, Shuichi, Hashimoto, Yoichiro, Sasajima, Masahiro, Hosoya, Kotaro, Dan, Yukari, Miyasaka, Shintaro, Yamaguchi, Susumu
Published in Microscopy and microanalysis (01.07.2017)
Published in Microscopy and microanalysis (01.07.2017)
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Journal Article
Charged particle beam device and charged particle beam device control method
Hosoya Kotaro, Saitou Tsutomu, Aoki Kenji, Nakamura Mitsuhiro, Shigeto Kunji
Year of Publication 30.01.2018
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Year of Publication 30.01.2018
Patent