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Elers, K.-E., Saanila, V., Soininen, P. J., Li, W.-M., Kostamo, J. T., Haukka, S., Juhanoja, J., Besling, W. F. A.
Published in Chemical vapor deposition (04.07.2002)
Published in Chemical vapor deposition (04.07.2002)
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Published in Optical review (Tokyo, Japan) (01.04.2024)
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Barrier properties of plastic films coated with an Al2O3 layer by roll-to-toll atomic layer deposition
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Published in Thin solid films (01.01.2014)
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전기 장치에서의 열 전도 ALD 코팅
LEHTO TERO, SALMINEN JYRI, KAARIA MARKKU, HAMEENOJA OSSI, KOSTAMO JUHANA
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Year of Publication 22.11.2017
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