Wear Reduction Method for Frictionally Fast Feeding Piezoactuator
Kosaka, Kouji, Iwabuchi, Tetsuya, Baba, Tetsuro, Endo, Taishi, Hashiguchi, Hiroyuki, Furukawa, Hiroyuki, Egashira, Yoshiya, Hashimoto, Seiji, Touge, Mutsumi, Uozumi, Kiyohiko, Nakada, Akira, Kubota, Hiroshi, Ohmi, Tadahiro
Published in Japanese Journal of Applied Physics (01.02.2006)
Published in Japanese Journal of Applied Physics (01.02.2006)
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Journal Article
Attoliter Control of Microliquid
Imura, Fumito, Kuroiwa, Hiroyuki, Nakada, Akira, Kosaka, Kouji, Kubota, Hiroshi
Published in Japanese Journal of Applied Physics (01.11.2007)
Published in Japanese Journal of Applied Physics (01.11.2007)
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Journal Article
Sub-Nanometer Resolution Ultrasonic Motor for 300 mm Wafer Lithography Precision Stage
Egashira, Yoshiya, Kosaka, Kouji, Iwabuchi, Tetsuya, Kosaka, Tetsuya, Baba, Tetsuro, Endo, Taishi, Hashiguchi, Hiroyuki, Harada, Takashi, Nagamoto, Keiichi, Watanabe, Masayuki, Yamakawa, Takahiro, Miyata, Noboru, Moriyama, Shiro, Morizono, Yasuhiro, Nakada, Akira, Kubota, Hiroshi, Ohmi, Tadahiro
Published in Japanese Journal of Applied Physics (2002)
Published in Japanese Journal of Applied Physics (2002)
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Journal Article
Slip-Free Driving Method for Nonresonant Piezoelectric Actuator
Endo, Taishi, Egashira, Yoshiya, Furukawa, Hiroyuki, Hashiguchi, Hiroyuki, Kosaka, Kouji, Watanabe, Masayuki, Miyata, Noboru, Moriyama, Shirou, Sasaki, Syunichi, Nakada, Akira, Ohmi, Tadahiro, Kubota, Hiroshi
Published in Japanese Journal of Applied Physics (01.07.2005)
Published in Japanese Journal of Applied Physics (01.07.2005)
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Journal Article
Development of QTAT online electronic circuit patterning system
Wakasugi, K., Wakimoto, S., Akamichi, T., Nakada, A., Kubota, H., Inokuchi, T., Suzuki, S., Aikawa, S., Kosaka, K., Nakamura, K., Morimoto, T.
Published in IEEE transactions on semiconductor manufacturing (01.11.2005)
Published in IEEE transactions on semiconductor manufacturing (01.11.2005)
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Journal Article
Nonlinear compensation method with bang-bang compensator for a high precision stage using synchronous piezoelectric device driver
Tsuruta, Kazuhiro, Sato, Kazuya, Sawada, Sunao, Kosaka, Kouji
Published in 2010 11th IEEE International Workshop on Advanced Motion Control (AMC) (01.03.2010)
Published in 2010 11th IEEE International Workshop on Advanced Motion Control (AMC) (01.03.2010)
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Conference Proceeding
Nonlinear friction compensation for a high precision stage using synchronous piezoelectric device driver
Tsuruta, K., Sato, K., Ushimi, N., Kosaka, K.
Published in 2009 IEEE International Conference on Industrial Technology (01.02.2009)
Published in 2009 IEEE International Conference on Industrial Technology (01.02.2009)
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Conference Proceeding
Adaptive Friction Compensation Design for Submicrometer Positioning of High Precision Stage
Truong Ngoc Minh, Ohishi, K., Takata, M., Hashimoto, S., Kosaka, K., Kubota, H., Ohmi, T.
Published in 2007 IEEE International Conference on Mechatronics (01.05.2007)
Published in 2007 IEEE International Conference on Mechatronics (01.05.2007)
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Conference Proceeding
Accurate friction compensation for precision stage using synchronous piezoelectric device driver
Truong Ngoc Minh, Ohishi, K., Takata, M., Hashimoto, S., Kosaka, K., Kubota, H., Ohmi, T.
Published in 9th IEEE International Workshop on Advanced Motion Control, 2006 (2006)
Published in 9th IEEE International Workshop on Advanced Motion Control, 2006 (2006)
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Conference Proceeding
0.69 nm resolution ultrasonic motor for large stroke precision stage
Egashira, Y., Kosaka, K., Takada, S., Iwabuchi, T., Baba, T., Moriyama, S., Harada, T., Nagamoto, K., Nakada, A., Kubota, H., Ohmi, T.
Published in Proceedings of the 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 (Cat. No.01EX516) (2001)
Published in Proceedings of the 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 (Cat. No.01EX516) (2001)
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Conference Proceeding