Effects of annealing temperature on the mechanical, optical, and electrical properties of hydrogenated, nitrogen-doped diamond-like carbon films
Osanai, Hiroya, Nakamura, Kazuki, Sasaki, Yuya, Koriyama, Haruto, Kobayashi, Yasuyuki, Enta, Yoshiharu, Suzuki, Yushi, Suemitsu, Maki, Nakazawa, Hideki
Published in Thin solid films (01.03.2022)
Published in Thin solid films (01.03.2022)
Get full text
Journal Article
Annealing effects on the properties of hydrogenated diamond-like carbon films doped with silicon and nitrogen
Nakazawa, Hideki, Nakamura, Kazuki, Osanai, Hiroya, Sasaki, Yuya, Koriyama, Haruto, Kobayashi, Yasuyuki, Enta, Yoshiharu, Suzuki, Yushi, Suemitsu, Maki
Published in Diamond and related materials (01.02.2022)
Published in Diamond and related materials (01.02.2022)
Get full text
Journal Article