Electrical and field emission properties of nanocrystalline materials fabricated by electron-beam induced deposition
Schößler, C., Kaya, A., Kretz, J., Weber, M., Koops, H.W.P.
Published in Microelectronic engineering (01.01.1996)
Published in Microelectronic engineering (01.01.1996)
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Tips for scanning tunneling microscopy produced by electron-beam-induced deposition
Hübner, B., Koops, H.W.P., Pagnia, H., Sotnik, N., Urban, J., Weber, M.
Published in Ultramicroscopy (01.07.1992)
Published in Ultramicroscopy (01.07.1992)
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Two-dimensional photonic crystals produced by additive nanolithography with electron beam-induced deposition act as filters in the infrared
Koops, H.W.P, Hoinkis, O.E, Honsberg, M.E.W, Schmidt, R, Blum, R, Böttger, G, Kuligk, A, Liguda, C, Eich, M
Published in Microelectronic engineering (01.09.2001)
Published in Microelectronic engineering (01.09.2001)
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On-line nanolithography using electron beam-induced deposition technique
Hübner, Uwe, Plontke, R., Blume, M., Reinhardt, A., Koops, H.W.P.
Published in Microelectronic engineering (01.09.2001)
Published in Microelectronic engineering (01.09.2001)
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Vapour supply manifold for additive nanolithography with electron beam induced deposition
Koops, H.W.P., Reinhardt, A., Klabunde, F., Kaya, A., Plontke, R.
Published in Microelectronic engineering (01.09.2001)
Published in Microelectronic engineering (01.09.2001)
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A miniaturized Orbitron pump for vacuum nanoelectronics
Koops, H.W.P.
Published in 2007 IEEE 20th International Vacuum Nanoelectronics Conference (01.07.2007)
Published in 2007 IEEE 20th International Vacuum Nanoelectronics Conference (01.07.2007)
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Conference Proceeding
Correction of axial chromatic aberration improves the contrast transfer in bright-field phase contrast imaging
Koops, H.W.P.
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (01.12.1990)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (01.12.1990)
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Evaluation of the dry resist Vinyl-T8 and ist application to optical microlenses
Koops, H.W.P., Babin, S., Weber, M., Dahm, G., Holopkin, A., Lyakhov, M.
Published in Microelectronic engineering (01.01.1996)
Published in Microelectronic engineering (01.01.1996)
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Investigation of a planar microtriode fabricated with direct write nanolithography using electron beam induced deposition
Sellmair, J., Edinger, K., Koops, H.W.P.
Published in Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737) (2004)
Published in Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737) (2004)
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Conference Proceeding
Quartz etching for phase shifting masks
Dahm, G., Rangelow, I.W., Hudek, P., Koops, H.W.P.
Published in Microelectronic engineering (01.02.1995)
Published in Microelectronic engineering (01.02.1995)
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Evaluation of the dry resist Vinyl-T8 and its application to optical microlenses
KOOPS, H.W.P, BABIN, S, WEBER, M, DAHM, G, HOLOPKIN, A, LYAKHOV, M
Published in Microelectronic engineering (1996)
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Published in Microelectronic engineering (1996)
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The scanning tunneling microscope as a tool for nanolithography: Writing nanostructures on Si (110) in air
Urban, J., Bra¨uer, S., McKinnon, A.W., Horn, J., Hjort, K., Pagnia, H., Koops, H.W.P., Hartnagel, H.L.
Published in Microelectronic engineering (01.02.1995)
Published in Microelectronic engineering (01.02.1995)
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Advanced multiple beam-shaping diaphragm for efficient exposure
Elsner, H., Döring, H.-J., Schacke, H., Dahm, G., Koops, H.W.P.
Published in Microelectronic engineering (1994)
Published in Microelectronic engineering (1994)
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Nanostructured Integrated Electron Source
Schoessler, C., Koops, H.W.P.
Published in 10th International Conference on Vacuum Microelectronics (1997)
Published in 10th International Conference on Vacuum Microelectronics (1997)
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