Integrated CVD–PVD Al plug processing for sub-half micron features
Konecni, A, Dixit, G, Russell, N.M, Luttmer, J.D, Havemann, R.H
Published in Thin solid films (04.05.1998)
Published in Thin solid films (04.05.1998)
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Journal Article
Conference Proceeding
Integrated barrier/plug fill schemes for high aspect ratio Gb DRAM contact metallization
Chen, Yu-Pei, Dixit, Girish A, Lu, Jiong-Ping, Hsu, Wei-Yung, Konecni, Anthony J, Luttmer, J.D, Havemann, Robert H
Published in Thin solid films (04.05.1998)
Published in Thin solid films (04.05.1998)
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Journal Article
Conference Proceeding
Sub-100 nm gate length metal gate NMOS transistors fabricated by a replacement gate process
Chatterjee, A., Chapman, R.A., Dixit, G., Kuehne, J., Hattangady, S., Yang, H., Brown, G.A., Aggarwal, R., Erdogan, U., He, Q., Hanratty, M., Rogers, D., Murtaza, S., Fang, S.J., Kraft, R., Rotondaro, A.L.P., Hu, J.C., Terry, M., Lee, W., Fernando, C., Konecni, A., Wells, G., Frystak, D., Bowen, C., Rodder, M., Chen, I.-C.
Published in International Electron Devices Meeting. IEDM Technical Digest (1997)
Published in International Electron Devices Meeting. IEDM Technical Digest (1997)
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Conference Proceeding
An integrated low resistance aluminum plug and low-k polymer dielectric for high performance 0.25 /spl mu/m interconnects
Dixit, G.A., Taylor, K.J., Singh, A., Lee, C.K., Shinn, G.B., Konecni, A., Hsu, W.Y., Brennan, K., Mi-Chang Chang, Havemann, R.H.
Published in 1996 Symposium on VLSI Technology. Digest of Technical Papers (1996)
Published in 1996 Symposium on VLSI Technology. Digest of Technical Papers (1996)
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Conference Proceeding
Composite removable hardmask and methods of producing the same
KONECNI, ANTHONY, PADHI, DEENESH, KIM, BOK HOEN, LIU, JOSEPHINE JUHWEI, MC CLINTOCK, WILLIAM H
Year of Publication 11.09.2016
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Year of Publication 11.09.2016
Patent
Composite removable hardmask
KIM BOK-HOEN, MC CLINTOCK WILLIAM H, KONECNI ANTHONY, LIU JOSEPHINE JUHWEI, PADHI DENEESH
Year of Publication 31.07.2013
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Year of Publication 31.07.2013
Patent
Composite removable hardmask
KONECNI, ANTHONY, PADHI, DEENESH, KIM, BOK HOEN, LIU, JOSEPHINE JUHWEI, MC CLINTOCK, WILLIAM H
Year of Publication 16.06.2012
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Year of Publication 16.06.2012
Patent
COMPOSITE REMOVABLE HARDMASK
MC CLINTOCK WILLIAM H, KONECNI ANTHONY, LIU JOSEPHINE JUHWEI, PADHI DENEESH, KIM BOK HOEN
Year of Publication 14.12.2018
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Year of Publication 14.12.2018
Patent
Contact metallization scheme using a barrier layer over a silicide layer
STEWART, MICHAEL P, KRISHNA, NETY M, WEIDMAN, TIMOTHY W, ZHU, ZHI-ZE, KHANDELWAL, AMIT, WANG, YAXIN, MEI, FANG, KONECNI, ANTHONY, SHANMUGASUNDRAM, ARULKUMAR, MOGHADAM, FARHAD K, WIJEKOON, KAPILA P, GANDIKOTA, SRINIVAS, GELATOS, AVGERINOS V, MICHAEL X. YANG
Year of Publication 16.02.2007
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Year of Publication 16.02.2007
Patent
COMPOSITE REMOVABLE HARDMASK
MC CLINTOCK WILLIAM H, KONECNI ANTHONY, LIU JOSEPHINE JUHWEI, PADHI DENEESH, KIM BOK HOEN
Year of Publication 06.11.2013
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Year of Publication 06.11.2013
Patent
COMPOSITIONS AND METHODS FOR THE PREPARATION OF NANOEMULSIONS
LAWTON CARL W, NICOLOSI ROBERT J, KUO FONGHSU, KAKUMANU SRI KANTH, KONECNI SHAWN
Year of Publication 27.12.2010
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Year of Publication 27.12.2010
Patent