Effectiveness of Aluminum Incorporation in Nickel Silicide and Nickel Germanide Metal Gates for Work Function Reduction
Lim, Andy Eu-Jin, Lee, Rinus T. P., Koh, Alvin T. Y., Samudra, Ganesh S., Kwong, Dim-Lee, Yeo, Yee-Chia
Published in Japanese Journal of Applied Physics (01.04.2008)
Published in Japanese Journal of Applied Physics (01.04.2008)
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