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WAFER EDGE MEASUREMENT AND CONTROL

WAFER EDGE MEASUREMENT AND CONTROL

by KOELMEL BLAKE
Year of Publication 14.01.2015

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Patent

EDGE RING FOR A THERMAL PROCESSING CHAMBER

EDGE RING FOR A THERMAL PROCESSING CHAMBER

by KOELMEL BLAKE, MAYUR ABHILASH J, RANISH JOSEPH M
Year of Publication 04.09.2020

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Patent

EDGE RING FOR A THERMAL PROCESSING CHAMBER

EDGE RING FOR A THERMAL PROCESSING CHAMBER

by KOELMEL BLAKE, MAYUR ABHILASH J, RANISH JOSEPH M
Year of Publication 26.02.2020

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Patent

TRANSPARENT REFLECTOR PLATE FOR RAPID THERMAL PROCESSING CHAMBER

TRANSPARENT REFLECTOR PLATE FOR RAPID THERMAL PROCESSING CHAMBER

by KOELMEL BLAKE R, LERNER ALEXANDER N, HUNTER AARON M
Year of Publication 10.05.2018

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Patent

APPARATUS AND METHODS FOR SUPPORTING AND CONTROLLING A SUBSTRATE

APPARATUS AND METHODS FOR SUPPORTING AND CONTROLLING A SUBSTRATE

by KOELMEL BLAKE, RANISH JOSEPH M
Year of Publication 18.03.2014

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Patent

NON-CONTACT SUBSTRATE PROCESSING

NON-CONTACT SUBSTRATE PROCESSING

by KOELMEL BLAKE, MYO NYI O
Year of Publication 27.10.2011

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Patent

IMPROVED EDGE RING LIP

IMPROVED EDGE RING LIP

by KOELMEL BLAKE, LAVITSKY ILYA, ADERHOLD WOLFGANG R, RANISH JOSEPH M
Year of Publication 28.05.2015

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Patent

RAPID THERMAL PROCESSING CHAMBER WITH MICRO-POSITIONING SYSTEM

RAPID THERMAL PROCESSING CHAMBER WITH MICRO-POSITIONING SYSTEM

by KOELMEL BLAKE R, LERNER ALEXANDER N, MERRY NIR, ADERHOLD WOLFGANG, SORABJI KHURSHED, HUNTER AARON M, RANISH JOSEPH M
Year of Publication 28.02.2018

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Patent

MILLISECOND ANNEALING DSA EDGE PROTECTION

MILLISECOND ANNEALING DSA EDGE PROTECTION

by KOELMEL BLAKE, MAYUR ABHILASH J, LARMAGNAC DAVID D. L, LERNER ALEXANDER N, YUDOVSKY JOSEPH, MCINTOSH ROBERT C
Year of Publication 26.06.2017

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Patent

APPARATUS AND METHODS FOR POSITIONING A SUBSTRATE USING CAPACITIVE SENSORS

APPARATUS AND METHODS FOR POSITIONING A SUBSTRATE USING CAPACITIVE SENSORS

by KOELMEL BLAKE, SANCHEZ ERROL C, RANISH JOSEPH M
Year of Publication 04.04.2014

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Patent

EDGE RING FOR A THERMAL PROCESSING CHAMBER

EDGE RING FOR A THERMAL PROCESSING CHAMBER

by KOELMEL BLAKE, MAYUR ABHILASH J, RANISH JOSEPH M
Year of Publication 21.01.2014

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Patent

TRANSPARENT REFLECTOR PLATE FOR RAPID THERMAL PROCESSING CHAMBER

TRANSPARENT REFLECTOR PLATE FOR RAPID THERMAL PROCESSING CHAMBER

by KOELMEL BLAKE R, LERNER ALEXANDER N, HUNTER AARON M
Year of Publication 06.08.2013

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Patent

APPARATUS AND METHOD FOR MEASURING RADIATION ENERGY DURING THERMAL PROCESSING

APPARATUS AND METHOD FOR MEASURING RADIATION ENERGY DURING THERMAL PROCESSING

by KOELMEL BLAKE, HUNTER AARON, RANISH JOSEPH M
Year of Publication 16.03.2011

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Patent

RAPID THERMAL PROCESSING CHAMBER WITH MICRO-POSITIONING SYSTEM

RAPID THERMAL PROCESSING CHAMBER WITH MICRO-POSITIONING SYSTEM

by KOELMEL BLAKE R, LERNER ALEXANDER N, MERRY NIR, ADERHOLD WOLFGANG, SORABJI KHURSHED, HUNTER AARON M, RANISH JOSEPH M
Year of Publication 16.03.2016

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Patent

MILLISECOND ANNEALING (DSA) EDGE PROTECTION

MILLISECOND ANNEALING (DSA) EDGE PROTECTION

by KOELMEL BLAKE, MAYUR ABHILASH J, LARMAGNAC DAVID D. L, LERNER ALEXANDER N, YUDOVSKY JOSEPH, MCINTOSH ROBERT C
Year of Publication 16.03.2016

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Patent

APPARATUS AND METHOD FOR ENHANCING THE COOL DOWN OF RADIATIVELY HEATED SUBSTRATES

APPARATUS AND METHOD FOR ENHANCING THE COOL DOWN OF RADIATIVELY HEATED SUBSTRATES

by KOELMEL BLAKE R, ADERHOLD WOLFGANG, RANISH JOSEPH M
Year of Publication 30.07.2012

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Patent

APPARATUS AND METHOD FOR IMPROVED CONTROL OF HEATING AND COOLING OF SUBSTRATES

APPARATUS AND METHOD FOR IMPROVED CONTROL OF HEATING AND COOLING OF SUBSTRATES

by TAM NORMAN L, KOELMEL BLAKE R, RANISH JOSEPH M
Year of Publication 20.07.2012

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Patent

WAFER EDGE MEASUREMENT AND CONTROL

WAFER EDGE MEASUREMENT AND CONTROL

by KOELMEL Blake
Year of Publication 01.02.2018

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Patent

Wafer edge measurement and control

Wafer edge measurement and control

by Koelmel Blake
Year of Publication 10.10.2017

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Patent

APPARATUS INCLUDING HEATING SOURCE REFLECTIVE FILTER FOR PYROMETRY

APPARATUS INCLUDING HEATING SOURCE REFLECTIVE FILTER FOR PYROMETRY

by KOELMEL BLAKE R, HUNTER AARON M, RANISH JOSEPH M
Year of Publication 13.01.2011

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Patent

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