Investigation of Electromechanical Coupling and Quality Factor of X-Cut Lithium Niobate Laterally Vibrating Resonators Operating Around 400 MHz
Pop, Flavius V., Kochhar, Abhay S., Vidal-Alvarez, Gabriel, Piazza, Gianluca
Published in Journal of microelectromechanical systems (01.06.2018)
Published in Journal of microelectromechanical systems (01.06.2018)
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Journal Article
Laterally vibrating lithium niobate MEMS resonators with 30% electromechanical coupling coefficient
Pop, Flavius V., Kochhar, Abhay S., Vidal-Alvarez, Gabriel, Piazza, Gianluca
Published in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2017)
Published in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2017)
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Conference Proceeding
Experimental investigation of damping factors in 20% scandium-doped aluminum nitride laterally vibrating resonators
Schaffer, Zachary A., Colombo, Luca, Kochhar, Abhay S., Piazza, Gianluca, Mishin, Sergey, Oshmyansky, Yury
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
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Conference Proceeding
제1 스퍼터링된 재료의 부분들의 제거를 통해 Ⅲ족 압전 박막들을 형성하는 방법들
MOE CRAIG, KIM DAE HO, KOCHHAR ABHAY SARANSWARUP, SHEALY JEFFREY B, WINTERS MARY
Year of Publication 19.04.2022
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Year of Publication 19.04.2022
Patent