Vapor-Phase Self-Assembled Monolayers for Anti-Stiction Applications in MEMS
Yan Xin Zhuang, Hansen, O., Knieling, T., Wang, C., Rombach, P., Lang, W., Benecke, W., Kehlenbeck, M., Koblitz, J.
Published in Journal of microelectromechanical systems (01.12.2007)
Published in Journal of microelectromechanical systems (01.12.2007)
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