Deposition of SiOC by plasma-free ultra-low-temperature ALD (ULT-ALD) and its passivation on p-type silicon
Meixi Chen, Noda, Naoto, Rochat, Raphael, Iyer, Abhishek, Hack, James H., Changhee Ko, Dussarrat, Christian, Opila, Robert L.
Published in 2017 IEEE 44th Photovoltaic Specialist Conference (PVSC) (01.06.2017)
Published in 2017 IEEE 44th Photovoltaic Specialist Conference (PVSC) (01.06.2017)
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Conference Proceeding
Polymer characterization by temperature gradient interaction chromatography
Chang, Taihyun, Lee, Hee Cheong, Lee, Wonmok, Park, Soojin, Ko, Changhee
Published in Macromolecular chemistry and physics (01.10.1999)
Published in Macromolecular chemistry and physics (01.10.1999)
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Journal Article
Substrate Dependent Growth Behaviors of Plasma-Enhanced Atomic Layer Deposited Nickel Oxide Films for Resistive Switching Application
Song, Seul Ji, Lee, Sang Woon, Kim, Gun Hwan, Seok, Jun Yeong, Yoon, Kyung Jean, Yoon, Jung Ho, Hwang, Cheol Seong, Gatineau, Julien, Ko, Changhee
Published in Chemistry of materials (21.12.2012)
Published in Chemistry of materials (21.12.2012)
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Journal Article
Growth of Conductive SrRuO3 Films by Combining Atomic Layer Deposited SrO and Chemical Vapor Deposited RuO2 Layers
Han, Jeong Hwan, Lee, Woongkyu, Jeon, Woojin, Lee, Sang Woon, Hwang, Cheol Seong, Ko, Changhee, Gatineau, Julien
Published in Chemistry of materials (21.12.2012)
Published in Chemistry of materials (21.12.2012)
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Journal Article
Synthesis and PEALD evaluation of new Nickel precursors
Gatineau, Satoko, Changhee Ko, Gatineau, Julien, Lansalot-Matras, Clement, Chang-Fang Hsiao
Published in IEEE International Interconnect Technology Conference (01.05.2014)
Published in IEEE International Interconnect Technology Conference (01.05.2014)
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Conference Proceeding
Growth of Conductive SrRuO 3 Films by Combining Atomic Layer Deposited SrO and Chemical Vapor Deposited RuO 2 Layers
Han, Jeong Hwan, Lee, Woongkyu, Jeon, Woojin, Lee, Sang Woon, Hwang, Cheol Seong, Ko, Changhee, Gatineau, Julien
Published in Chemistry of materials (21.12.2012)
Published in Chemistry of materials (21.12.2012)
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Journal Article
Characterization of polydisperse poly(vinyl chloride) by temperature gradient interaction chromatography
Park, Soojin, Ko, Changhee, Choi, Heungyeal, Kwon, Kyoon, Chang, Taihyun
Published in Journal of Chromatography A (04.08.2006)
Published in Journal of Chromatography A (04.08.2006)
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Journal Article
Thin nickel films growth using plasma enhanced atomic layer deposition from η3-2-methylallyl N, N'-diisopropylacetamidinate nickel(II)
Yokota, Jiro, Lansalot, Clement, Changhee Ko
Published in 2013 IEEE International Interconnect Technology Conference - IITC (01.06.2013)
Published in 2013 IEEE International Interconnect Technology Conference - IITC (01.06.2013)
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Conference Proceeding
VAPOR DISPOSITION OF SILICON-CONTAINING FILMS USING PENTA-SUBSTITUTED DISILANES
Okubo, Shingo, Girard, Jean-Marc, Noda, Naoto, Ko, Changhee, Oshchepkov, Ivan, Gatineau, Julien, Martelat, Yann, Yanagita, Kazutaka
Year of Publication 24.01.2019
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Year of Publication 24.01.2019
Patent
Titanium-containing film forming compositions for vapor deposition of titanium-containing films
Ko Changhee, Ishii Hana, Gatineau Julien, Lieffrig Julien, Lansalot-Matras Clément
Year of Publication 17.10.2017
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Year of Publication 17.10.2017
Patent
Vapor deposition of silicon-containing films using penta-substituted disilanes
Yanagita Kazutaka, Ko Changhee, Oshchepkov Ivan, Noda Naoto, Girard Jean-Marc, Okubo Shingo, Gatineau Julien
Year of Publication 25.04.2017
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Year of Publication 25.04.2017
Patent
The Structural and Electrical Properties in CeO 2 Dielectric on Ge Substrate for MOS Capacitors by Atomic Layer Deposition with Ce(iprCp) 3
Oh, Il-Kwon, Kim, Min-Kyu, Park, Ju-Sang, Gatineaub, Julien, Changhee, Ko, Kim, Hyungjun
Published in Meeting abstracts (Electrochemical Society) (04.06.2012)
Published in Meeting abstracts (Electrochemical Society) (04.06.2012)
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Journal Article
A Combined Experimental with Computational Study of Precursor Stability and ALD Growth Mechanism in Tantalum Nitride Deposition
Pullumbi, Pluton, Correia Anacleto, Anthony, Cany-Canian, David, Ko, Changhee, Zauner, Andy, Gatineau, Julien, Hugon, Marie-Christine
Published in Meeting abstracts (Electrochemical Society) (05.02.2010)
Published in Meeting abstracts (Electrochemical Society) (05.02.2010)
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Journal Article