Effect of radio-frequency electric power applied to a boron nitride unbalanced magnetron sputter target on the deposition of cubic boron nitride thin film
Ko, Ji-Sun, Park, Jong-Keuk, Lee, Wook-Seong, Huh, Joo-Youl, Baik, Young-Joon
Published in Metals and materials international (01.11.2013)
Published in Metals and materials international (01.11.2013)
Get full text
Journal Article
Effect of hydrogen addition on the residual stress of B–C–N films with cubic boron nitride phase prepared by r.f. magnetron sputtering of a B4C target
Park, Jong-Keuk, Ko, Ji-Sun, Baik, Young-Joon
Published in Surface & coatings technology (25.01.2013)
Published in Surface & coatings technology (25.01.2013)
Get full text
Journal Article
Conference Proceeding