Model polymer etching and surface modification by a time modulated RF plasma jet: role of atomic oxygen and water vapor
Luan, P., Knoll, A. J., Wang, H., Kondeti, V. S. S. K., Bruggeman, P. J., Oehrlein, G. S.
Published in Journal of physics. D, Applied physics (13.12.2016)
Get full text
Published in Journal of physics. D, Applied physics (13.12.2016)
Journal Article