Method for controlling stress gradients in PVD aluminum nitride
Knisely, Katherine E, Hunt, Bram, Troelsen, Brian, Douglas, Erica, Griffin, Benjamin A, Stevens, James E
Published in Journal of micromechanics and microengineering (01.11.2018)
Published in Journal of micromechanics and microengineering (01.11.2018)
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Journal Article
Modeling, fabrication, and testing of a MEMS multichannel aln transducer for a completely implantable cochelar implant
Chuming Zhao, Knisely, Katherine E., Grosh, Karl
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
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Conference Proceeding