Hydrofluoric-Acid-Resistant and Hydrophobic Pure-Silica-Zeolite MEL Low-Dielectric-Constant Films
Lew, Christopher M, Liu, Yan, Day, Brandon, Kloster, Grant M, Tiznado, Hugo, Sun, Minwei, Zaera, Francisco, Wang, Junlan, Yan, Yushan
Published in Langmuir (05.05.2009)
Published in Langmuir (05.05.2009)
Get full text
Journal Article
Insight into On-Wafer Crystallization of Pure-Silica-Zeolite Films through Nutrient Replenishment
Lew, Christopher M, Liu, Yan, Kisailus, David, Kloster, Grant M, Chow, Gabriel, Boyanov, Boyan, Sun, Minwei, Wang, Junlan, Yan, Yushan
Published in Langmuir (05.04.2011)
Published in Langmuir (05.04.2011)
Get full text
Journal Article
Synthesis, Characterization, and Transport Properties of New Mixed Ionic−Electronic Conducting V2O5−Polymer Electrolyte Xerogel Nanocomposites
Kloster, Grant M, Thomas, Joyce Albritton, Brazis, Paul W, Kannewurf, C. R, Shriver, Duward F
Published in Chemistry of materials (15.10.1996)
Published in Chemistry of materials (15.10.1996)
Get full text
Journal Article
SELECTIVE GATE SPACERS FOR SEMICONDUCTOR DEVICES
LIAO SZUYA S, HOURANI RAMI, CLENDENNING SCOTT B, KLOSTER GRANT M, MITAN MARTIN M, GSTREIN FLORIAN, ROMERO PATRICIO E
Year of Publication 02.06.2021
Get full text
Year of Publication 02.06.2021
Patent
On-Wafer Crystallization of Ultralow-κ Pure Silica Zeolite Films
Liu, Yan, Lew, Christopher M, Sun, Minwei, Cai, Rui, Wang, Junlan, Kloster, Grant, Boyanov, Boyan, Yan, Yushan
Published in Angewandte Chemie (International ed.) (01.01.2009)
Published in Angewandte Chemie (International ed.) (01.01.2009)
Get full text
Journal Article
SELECTIVE DEPOSITION UTILIZING SACRIFICIAL BLOCKING LAYERS FOR SEMICONDUCTOR DEVICES
HOURANI RAMI, LIAO SZUYA S, CLENDENNING SCOTT B, KLOSTER GRANT, ROMERO PATRICIO E, GSTREIN FLORIAN
Year of Publication 23.08.2017
Get full text
Year of Publication 23.08.2017
Patent
Nb(OCH(CF 3) 2) 6−: prototype for a new class of weakly coordinating anions based on polyfluoroalkoxide substituents
Rockwell, Juston J., Kloster, Grant M., DuBay, William J., Grieco, Paul A., Shriver, Duward F., Strauss, Steven H.
Published in Inorganica Chimica Acta (01.10.1997)
Published in Inorganica Chimica Acta (01.10.1997)
Get full text
Journal Article
SELECTIVE GATE SPACERS FOR SEMICONDUCTOR DEVICES
LIAO SZUYA S, HOURANI RAMI, CLENDENNING SCOTT B, KLOSTER GRANT M, MITAN MARTIN M, GSTREIN FLORIAN, ROMERO PATRICIO E
Year of Publication 08.06.2017
Get full text
Year of Publication 08.06.2017
Patent
반도체 구조체들을 위한 금속 피처들의 BUF(Bottom-Up Fill)
HOURANI RAMI, GRIGGIO FLAVIO, GLASSMAN TIMOTHY E, CLENDENNING SCOTT B, KLOSTER GRANT M, MITAN MARTIN M, FRASURE KENT N, GSTREIN FLORIAN
Year of Publication 21.02.2018
Get full text
Year of Publication 21.02.2018
Patent
ALD CVD PRECURSOR AND PROCESS DESIGN FOR PHOTO-ASSISTED METAL ATOMIC LAYER DEPOSITION ALD AND CHEMICAL VAPOR DEPOSITION CVD
BLACKWELL JAMES M, ZIMMERMAN PAUL A, CLENDENNING SCOTT B, KLOSTER GRANT M, ROMERO PATRICIO E, GSTREIN FLORIAN, SIMKA HARSONO S, BRISTOL ROBERT L
Year of Publication 02.12.2016
Get full text
Year of Publication 02.12.2016
Patent
FORMING LAYERS OF MATERIALS OVER SMALL REGIONS BY SELECTIVE CHEMICAL REACTION INCLUDING LIMITING ENCROACHMENT OF THE LAYERS OVER ADJACENT REGIONS
BLACKWELL JAMES M, HOURANI RAMI, ROBERTS JEANETTE M, CLENDENNING SCOTT B, KLOSTER GRANT M, HAN EUNGNAK, GSTREIN FLORIAN, ROMERO PATRICIO E, BRISTOL ROBERT L
Year of Publication 01.06.2016
Get full text
Year of Publication 01.06.2016
Patent