Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review
Klemenschits, Xaver, Selberherr, Siegfried, Filipovic, Lado
Published in Micromachines (Basel) (29.11.2018)
Published in Micromachines (Basel) (29.11.2018)
Get full text
Journal Article
Effect of Mask Geometry Variation on Plasma Etching Profiles
Bobinac, Josip, Reiter, Tobias, Piso, Julius, Klemenschits, Xaver, Baumgartner, Oskar, Stanojevic, Zlatan, Strof, Georg, Karner, Markus, Filipovic, Lado
Published in Micromachines (Basel) (16.03.2023)
Published in Micromachines (Basel) (16.03.2023)
Get full text
Journal Article
Impact of plasma induced damage on the fabrication of 3D NAND flash memory
Reiter, Tobias, Klemenschits, Xaver, Filipovic, Lado
Published in Solid-state electronics (01.06.2022)
Published in Solid-state electronics (01.06.2022)
Get full text
Journal Article
Fast Model for Deposition in Trenches using Geometric Advection
Filipovic, Lado, Klemenschits, Xaver
Published in 2021 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (27.09.2021)
Published in 2021 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (27.09.2021)
Get full text
Conference Proceeding
Modeling Plasma-Induced Damage During the Dry Etching of Silicon
Reiter, Tobias, Klemenschits, Xaver, Filipovic, Lado
Published in 2022 IEEE International Integrated Reliability Workshop (IIRW) (09.10.2022)
Published in 2022 IEEE International Integrated Reliability Workshop (IIRW) (09.10.2022)
Get full text
Conference Proceeding
Modeling incomplete conformality during atomic layer deposition in high aspect ratio structures
Aguinsky, Luiz Felipe, Rodrigues, Frâncio, Reiter, Tobias, Klemenschits, Xaver, Filipovic, Lado, Hössinger, Andreas, Weinbub, Josef
Published in Solid-state electronics (01.03.2023)
Published in Solid-state electronics (01.03.2023)
Get full text
Journal Article
DTCO flow for air spacer generation and its impact on power and performance at N7
Filipovic, Lado, Baumgartner, Oskar, Klemenschits, Xaver, Piso, Julius, Bobinac, Josip, Reiter, Tobias, Strof, Georg, Rzepa, Gerhard, Stanojevic, Zlatan, Karner, Markus
Published in Solid-state electronics (01.01.2023)
Published in Solid-state electronics (01.01.2023)
Get full text
Journal Article
Geometric Advection Algorithm for Process Emulation
Klemenschits, Xaver, Selberherr, Siegfried, Filipovic, Lado
Published in 2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (23.09.2020)
Published in 2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (23.09.2020)
Get full text
Conference Proceeding
Process Simulation in the Browser: Porting ViennaTS using WebAssembly
Klemenschits, Xaver, Manstetten, Paul, Filipovic, Lado, Selberherr, Siegfried
Published in 2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (01.09.2019)
Published in 2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (01.09.2019)
Get full text
Conference Proceeding
Impact of High-Aspect-Ratio Etching Damage on Selective Epitaxial Silicon Growth in 3D NAND Flash Memory
Reiter, Tobias, Klemenschits, Xaver, Filipovic, Lado
Published in 2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS) (01.09.2021)
Published in 2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS) (01.09.2021)
Get full text
Conference Proceeding
Modeling Incomplete Conformality during Atomic Layer Deposition in High Aspect Ratio Structures
Luiz Felipe Aguinsky, Rodrigues, Frâncio, Reiter, Tobias, Klemenschits, Xaver, Filipovic, Lado, Hössinger, Andreas, Weinbub, Josef
Published in arXiv.org (16.12.2022)
Published in arXiv.org (16.12.2022)
Get full text
Paper
Journal Article
Unified feature scale model for etching in SF6 and Cl plasma chemistries
Klemenschits, Xaver, Selberherr, Siegfried, Filipovic, Lado
Published in 2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) (01.03.2018)
Published in 2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) (01.03.2018)
Get full text
Conference Proceeding