Monolithic fringe-field-activated crystalline silicon tilting-mirror devices
Greywall, D.S., Chien-Shing Pai, Sang-Hyun Oh, Chorng-Ping Chang, Marom, D.M., Busch, P.A., Cirelli, R.A., Taylor, J.A., Klemens, F.P., Sorsch, T.W., Bower, J.E., Lai, W.Y.-C., Soh, H.T.
Published in Journal of microelectromechanical systems (01.10.2003)
Published in Journal of microelectromechanical systems (01.10.2003)
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Journal Article
MEMS thermal imager with optical readout
Jones, C.D.W., Bolle, C.A., Ryf, R., Simon, M.E., Pardo, F., Aksyuk, V.A., Lai, W.Y.-C., Bower, J.E., Miner, J.F., Klemens, F.P., Cirelli, R.A., Sorsch, T.W., Ferry, E.J., Fetter, L.A., Pai, C.-S., Taylor, J.A., Vyas, B., Watson, G.P., Stekas, B., Baker, M.R., Papazian, A.R., Basavanhally, N.R., Mansfield, W.M., Kornblit, A., Keller, R.C., Gates, J.V., Ramirez, A.P.
Published in Sensors and actuators. A. Physical. (01.10.2009)
Published in Sensors and actuators. A. Physical. (01.10.2009)
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Journal Article
All Dry Lithography: Applications of Plasma Polymerized Methylsilane as aSingle Layer Resist and Silicon Dioxide Precursor
Weidman, T. W., Joubert, O., Joshi, A. M., Lee, J. T-C, Boulin, D., Chandross, E. A., Cirelli, R., Klemens, F.P., Maynard, H.L., Donnelly, V.M.
Published in Journal of photopolymer science and technology (1995)
Published in Journal of photopolymer science and technology (1995)
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Journal Article
Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators
Pardo, Flavio, Cirelli, R.A., Ferry, E.J., Lai, W.Y.-C., Klemens, F.P., Miner, J.F., Pai, C.S., Bower, J.E., Mansfield, W.M., Kornblit, A., Sorsch, T.W., Taylor, J.A., Baker, M.R., Fullowan, R., Simon, M.E., Aksyuk, V.A., Ryf, R., Dyson, H., Arney, S.
Published in Microelectronic engineering (01.05.2007)
Published in Microelectronic engineering (01.05.2007)
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Journal Article
Conference Proceeding
The vertical replacement-gate (VRG) MOSFET
Hergenrother, J.M., Oh, Sang-Hyun, Nigam, T., Monroe, D., Klemens, F.P., Kornblit, A.
Published in Solid-state electronics (01.07.2002)
Published in Solid-state electronics (01.07.2002)
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Journal Article
Compact and broadband coherent receiver front-end for complete demodulation of a 1.12-terabit/s multi-carrier PDM-QPSK signal
Xiang Liu, Gill, D.M., Chandrasekhar, S., Buhl, L.L., Earnshaw, M., Cappuzzo, M.A., Gomez, L.T., Chen, Y., Klemens, F.P., Burrows, E.C., Chen, Y.-K., Tkach, R.W.
Published in 2009 35th European Conference on Optical Communication (01.09.2009)
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Published in 2009 35th European Conference on Optical Communication (01.09.2009)
Conference Proceeding
Air-gaps in 0.3 [micro]m electrical interconnections
Kohl, P.A, Bhusari, D.M, Wedlake, M, Case, C, Klemens, F.P, Miner, J, Lee, Byung-Chan, Gutmann, R.J, Shick, R
Published in IEEE electron device letters (01.12.2000)
Published in IEEE electron device letters (01.12.2000)
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Journal Article
Probing the limits of optical lithography: The fabrication of sub-100nm devices with 193nm wavelength lithography
Cirelli, R.A., Bude, J., Houlihan, F., Gabor, A., Watson, G.P., Weber, G.R., Klemens, F.P., Sweeney, J., Mansfield, W.M., Nalamasu, O.
Published in Microelectronic engineering (01.06.2000)
Published in Microelectronic engineering (01.06.2000)
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Journal Article
Conference Proceeding
All Dry Lithography
W. Weidman, T, Joubert, O, M. Joshi, A, T-C Lee, J, Boulin, D, A. Chandross, E, Cirelli, R, Klemens, F.P, Maynard, H.L, Donnelly, V.M
Published in Journal of photopolymer science and technology (01.10.1995)
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Published in Journal of photopolymer science and technology (01.10.1995)
Journal Article
All Dry Lithography: Applications of Plasma Polymerized Methylsilane as a Single Layer Resist and Silicon Dioxide Precursor
Weidman, T. W., Joubert, O., Joshi, A. M., Lee, J. T-C, Boulin, D., Chandross, E. A., Cirelli, R., Klemens, F.P., Maynard, H.L., Donnelly, V.M.
Published in Journal of Photopolymer Science and Technology (1995)
Published in Journal of Photopolymer Science and Technology (1995)
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Journal Article
Characterization of Piston-Tip-Tilt mirror pixels for scalable SLM arrays
Pardo, F., Simon, M.E., Aksyuk, V.A., Ryf, R., Lai, W.Y.-C., Pai, C.S., Klemens, F.P., Miner, J.F., Cirelli, R.A., Ferry, E.J., Bower, J.E., Mansfield, W.M., Kornblit, A., Sorsch, T.W., Taylor, J.A., Baker, M.R., Fullowan, R., Dyson, H., Gasparyan, A., Low, Y., Ramsey, D., Arney, S.
Published in IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 (2006)
Published in IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 (2006)
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Conference Proceeding
50 nm Vertical Replacement-Gate (VRG) pMOSFETs
Sang-Hyun Oh, Hergenrother, J.M., Nigam, T., Monroe, D., Klemens, F.P., Kornblit, A., Mansfield, W.M., Baker, M.R., Barr, D.L., Baumann, F.H., Bolan, K.J., Boone, T., Ciampa, N.A., Cirelli, R.A., Eaglesham, D.J., Ferry, E.J., Fiory, A.T., Frackoviak, J., Garno, J.P., Gossmann, H.J., Grazul, J.L., Green, M.L., Hillenius, S.J., Johnson, R.W., Keller, R.C., King, C.A., Kleiman, R.N., Lee, J.T.-C., Miner, J.F., Morris, M.D., Rafferty, C.S., Rosamilia, J.M., Short, K., Sorsch, T.W., Timko, A.G., Weber, G.R., Wilk, G.D., Plummer, J.D.
Published in International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138) (2000)
Published in International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138) (2000)
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Conference Proceeding
Improved film growth and flatband voltage control of ALD HfO/sub 2/ and Hf-Al-O with n/sup +/ poly-Si gates using chemical oxides and optimized post-annealing
Wilk, G.D., Green, M.L., Ho, M.-Y., Busch, B.W., Sorsch, T.W., Klemens, F.P., Brijs, B., van Dover, R.B., Kornblit, A., Gustafsson, T., Garfunkel, E., Hillenius, S., Monroe, D., Kalavade, P., Hergenrother, J.M.
Published in 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) (2002)
Published in 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) (2002)
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Conference Proceeding
Wavelength-selective 1/spl times/4 switch for 128 WDM channels at 50 GHz spacing
Marom, D.M., Neilson, D.T., Greywall, D.S., Basavanhally, N.R., Kolodner, P.R., Low, Y.L., Pardo, F., Bolle, C.A., Chandrasekhar, S., Buhl, L., Giles, C.R., Oh, S.-H., Pai, C.S., Werder, K., Soh, H.T., Bogart, G.R., Ferry, E., Klemens, F.P., Teffeau, K., Miner, J.F., Rogers, S., Bower, J.E., Keller, R.C., Mansfield, W.
Published in Optical Fiber Communication Conference and Exhibit (2002)
Published in Optical Fiber Communication Conference and Exhibit (2002)
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Conference Proceeding
High-dynamic range channelized MEMS equalizing filter
Neilson, D.T., Greywall, D.S., Chandrasekhar, S., Buhl, L.L., Tang, H., Ko, L., Basavanhally, N.R., Pardo, F., Ramsey, D.A., Weld, J.D., Low, Y.L., Prybyla, J., Scotti, R., Gasparyan, A., Maueis, M., Arney, S., O'Neill, S.P., Pai, C.-S., Malkani, D.H., Meyers, M.M., Saluzzi, N., Oh, S.H., Lopez, O.D., Bogart, G.R., Klemens, F.P., Luo, M., Liu, J.Q., Teffeau, K., Ramirez, A., Werder, K.S., Griffith, J.E., Frye, C., Kunnavakkam, M.V., Stanton, S.T., Liddle, J.A., Soh, H.T., Lee, T.-C., Nalamasu, O., Nguyen, K.C.
Published in Optical Fiber Communication Conference and Exhibit (2002)
Published in Optical Fiber Communication Conference and Exhibit (2002)
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Conference Proceeding
SALVO process for sub-50 nm low-V/sub T/ replacement gate CMOS with KrF lithography
Chang, C.-P., Vuang, H.-H., Baker, M.R., Pai, C.S., Klemens, F.P., Miner, J.F., Mansfield, W.M., Kleiman, R.N., Kornbllit, A., Baumann, F.H., Rogers, S.N., Bude, M., Grazul, J.L., Lloyd, E.J., Frei, M., Sorsch, T.W., Cirelli, R., Ferry, E., Bolan, K., Barr, D., Lee, J.T.-C.
Published in International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138) (2000)
Published in International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138) (2000)
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Conference Proceeding
Fringe-field-activated SOI tilting mirrors
Greywall, D.S., Chien-Shing Pai, Sang-Hyun Oh, Chorng-Ping Chang, Marom, D.M., Stanton, S., Busch, P.A., Cirelli, R.A., Taylor, J.A., Klemens, F.P., Sorsch, T.W., Bower, J.E., Lai, W.Y.-C., Soh, H.T.
Published in 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682) (2003)
Published in 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682) (2003)
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Conference Proceeding
50 nm vertical replacement-gate (VRG) nMOSFETs with ALD HfO/sub 2/ and Al/sub 2/O/sub 3/ gate dielectrics
Hergenrother, J.M., Wilk, G.D., Nigam, T., Klemens, F.P., Monroe, D., Silverman, P.J., Sorsch, T.W., Busch, B., Green, M.L., Baker, M.R., Boone, T., Bude, M.K., Ciampa, N.A., Ferry, E.J., Fiory, A.T., Hillenius, S.J., Jacobson, D.C., Johnson, R.W., Kalavade, P., Keller, R.C., King, C.A., Kornblit, A., Krautter, H.W., Lee, J.T.-C., Mansfield, W.M., Miner, J.F., Morris, M.D., Oh, S.-H., Rosamilia, J.M., Sapjeta, B.J., Short, K., Steiner, K., Muller, D.A., Voyles, P.M., Grazul, J.L., Shero, E.J., Givens, M.E., Pomarede, C., Mazanec, M., Werkhoven, C.
Published in International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224) (2001)
Published in International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224) (2001)
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Conference Proceeding
Multi-service optical node based on low-loss MEMS optical crossconnect switch
Ryf, R., Neilson, D.T., Kolodner, P.R., Kim, J., Hickey, J.P., Carr, D., Aksyuk, V., Greywall, D.S., Pardo, F., Bolle, C., Frahm, R., Basavanhally, N.R., Ramsey, D.A., George, R., Kraus, J., Lichtenwalner, C., Papazian, R., Nuzman, C., Weiss, A., Kumar, B., Lieuwen, D., Gates, J., Shea, H.R., Gasparyan, A., Lifton, V.A., Prybyla, J.A., Goyal, S., Ruel, R., Nijander, C., Arney, S., Bishop, D.J., Giles, C.R., Pau, S., Mansfield, W.M., Jin, S., Lai, W.Y., Barr, D.L., Cirelli, R.A., Bogart, G.R., Teffeau, K., Vella, R., Ramirez, A., Klemens, F.P., Liu, J.Q., Rosamilia, J.M., Soh, H.T., Lee, T.C.
Published in Optical Fiber Communication Conference and Exhibit (2002)
Published in Optical Fiber Communication Conference and Exhibit (2002)
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Conference Proceeding