Observer design for a nonlinear heat equation: Application to semiconductor wafer processing
Schaum, Alexander, Koch, Stefan, Kleindienst, Martin, Reichhartinger, Markus, Meurer, Thomas, Moreno, Jaime A., Horn, Martin
Published in Journal of process control (01.11.2022)
Published in Journal of process control (01.11.2022)
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Journal Article
Sliding Mode Control of a Distributed-Parameter Wafer Spin Clean Process
Koch, Stefan, Kleindienst, Martin, Moreno, Jaime A., Horn, Martin
Published in IEEE transactions on control systems technology (01.09.2021)
Published in IEEE transactions on control systems technology (01.09.2021)
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Journal Article
Observer-based temperature control of an LED heated silicon wafer
Kleindienst, Martin, Reichhartinger, Markus, Horn, Martin, Staudegger, Felix
Published in Journal of process control (01.10.2018)
Published in Journal of process control (01.10.2018)
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Journal Article
Data-Driven Modelling and Robust Control of a Semiconductor Manufacturing Process
Mayr, Paul, Kleindienst, Martin, Koch, Stefan, Reichhartinger, Markus, Horn, Martin
Published in IFAC-PapersOnLine (01.01.2023)
Published in IFAC-PapersOnLine (01.01.2023)
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Journal Article
DEAL FREES CUBANS SECRET TREATY ADMITS GUANTANAMO RAFTERS, SHUTS DOOR TO OTHERS Series: THE CUBAN AGREEMENT: FINAL Edition
E.A. TORRIERO Staff Writer Staff Writers David Beard, Sergio R. Bustos, Roberto Fabricio, William E. Gibson, Linda Kleindienst and Nancy San Martin contributed to this report, which was supplemented with information from The Associated Press. Staff
Published in Sun-sentinel (Fort Lauderdale, Fla.) (03.05.1995)
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Published in Sun-sentinel (Fort Lauderdale, Fla.) (03.05.1995)
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