OPTICAL ELEMENT MOUNT FOR LITHOGRAPHIC APPARATUS
BEERENS RUUD ANTONIUS CATHARINA MARIA, HENRICUS GERARDUS TEGENBOSCH, KLEIJN JACOB, ALEXANDER MATTHIJS STRUYCKEN, IVO VANDERHALLEN
Year of Publication 25.12.2014
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Year of Publication 25.12.2014
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OPTICAL ELEMENT MOUNT FOR LITHOGRAPHIC APPARATUS
VANDERHALLEN IVO, TEGENBOSCH HENRICUS GERARDUS, BEERENS RUUD ANTONIUS CATHARINA MARIA, STRUYCKEN ALEXANDER MATTHIJS, KLEIJN JACOB
Year of Publication 25.03.2011
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Year of Publication 25.03.2011
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Optical element mount for lithographic apparatus
VANDERHALLEN IVO, TEGENBOSCH HENRICUS GERARDUS, BEERENS RUUD ANTONIUS CATHARINA MARIA, STRUYCKEN ALEXANDER MATTHIJS, KLEIJN JACOB
Year of Publication 10.05.2016
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Year of Publication 10.05.2016
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Lithographic apparatus, composite material and manufacturing method
UBBINK MARK PETRUS, SCHOLTEN MARK, KLEIJN JACOB, LIBOUREL STEPHAN CHRISTIAAN QUINTUS
Year of Publication 30.09.2014
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Year of Publication 30.09.2014
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Optical element mount for lithographic apparatus
JACOB KLEIJN, RUUD BEERENS, ALEXANDER STRUYCKEN, HENRICUS TEGENBOSCH, IVO VANDERHALLEN
Year of Publication 22.01.2010
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Year of Publication 22.01.2010
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LITHOGRAPHY APPARATUS, AND COMPOSITE MATERIAL AND METHOD FOR PRODUCING THE SAME
UBBINK MARK PETRUS, MARK SCHOLTEN, KLEIJN JACOB, LIBOUREL STEPHAN CHRISTIAAN QUINTUS
Year of Publication 24.12.2009
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Year of Publication 24.12.2009
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LITHOGRAPHIC APPARATUS, COMPOSITE MATERIAL AND MANUFACTURING METHOD
UBBINK MARK PETRUS, SCHOLTEN MARK, KLEIJN JACOB, LIBOUREL STEPHAN CHRISTIAAN QUINTUS
Year of Publication 17.12.2009
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Year of Publication 17.12.2009
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LITHOGRAPHIC APPARATUS, COMPOSITE MATERIAL AND MANUFACTURING METHOD
UBBINK MARK PETRUS, SCHOLTEN MARK, KLEIJN JACOB, LIBOUREL STEPHAN CHRISTIAAN QUINTUS
Year of Publication 16.12.2009
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Year of Publication 16.12.2009
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A mount configured to mount an optical element in a module for a lithographic apparatus, a module for a lithographic apparatus, and a resilient member constructed and arranged to exert a force on a perimeter of an optical element of a module of a lithogr
BEERENS, RUUD ANTONIUS CATHARINA MARIA, VANDERHALLEN, IVO, KLEIJN, JACOB, STRUYCKEN, ALEXANDER MATTHIJS, TEGENBOSCH, HENRICUS GERARDUS
Year of Publication 21.09.2014
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Year of Publication 21.09.2014
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Optical element mount for lithographic apparatus
VANDERHALLEN IVO, TEGENBOSCH HENRICUS GERARDUS, BEERENS RUUD ANTONIUS CATHARINA MARIA, STRUYCKEN ALEXANDER MATTHIJS, KLEIJN JACOB
Year of Publication 20.08.2014
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Year of Publication 20.08.2014
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Lithographic apparatus, composite material and manufacturing method
LIBOUREL, STEPHAN CHRISTIAAN QUINTUS, UBBINK, MARK PETRUS, KLEIJN, JACOB, SCHOLTEN, MARK
Year of Publication 21.08.2013
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Year of Publication 21.08.2013
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Lithographic apparatus, composite material and manufacturing method
UBBINK MARK PETRUS, SCHOLTEN MARK, KLEIJN JACOB, LIBOUREL STEPHAN CHRISTIAAN QU
Year of Publication 10.07.2013
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Year of Publication 10.07.2013
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Optical element mount for lithographic apparatus
VANDERHALLEN IVO, TEGENBOSCH HENRICUS GERARDUS, BEERENS RUUD ANTONIUS CATHARINA MARIA, STRUYCKEN ALEXANDER MATTHIJS, KLEIJN JACOB
Year of Publication 15.06.2011
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Year of Publication 15.06.2011
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Optical element mount for lithographic apparatus
BEERENS, RUUD ANTONIUS CATHARINA MARIA, VANDERHALLEN, IVO, KLEIJN, JACOB, STRUYCKEN, ALEXANDER MATTHIJS, TEGENBOSCH, HENRICUS GERARDUS
Year of Publication 01.03.2010
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Year of Publication 01.03.2010
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Lithographic apparatus, composite material and manufacturing method
LIBOUREL, STEPHAN CHRISTIAAN QUINTUS, UBBINK, MARK PETRUS, KLEIJN, JACOB, SCHOLTEN, MARK
Year of Publication 16.01.2010
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Year of Publication 16.01.2010
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