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"Klarner, Ullrich"
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"Klarner, Ullrich"
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SCREW TRANSMISSION DRIVE, AND RETICLE STAGE AND MEASURING DEVICE FOR SEMICONDUCTOR LITHOGRAPHY APPLICATIONS
by
ZSCHÄCK, Stephan
,
KLARNER
,
Ullrich
,
HEIDENREICH, Alexander
,
WEISSENBERG, Steffen
Year of Publication
04.01.2024
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Schraubgetriebeantrieb sowie Retikel-Stage und Vermessungsvorrichtung für Halbleiter-Lithografie-Anwendungen
by
Klarner
,
Ullrich
,
Weissenberg, Steffen
,
Zschäck, Stephan
,
Heidenreich, Alexander
Year of Publication
19.10.2023
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Compact spectrometer
by
Kerstan, Felix
,
Klarner
,
Ullrich
,
Correns, Nico
,
Tumpach, Gregor
Year of Publication
06.05.2008
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Compact spectrometer
by
KLARNER ULLRICH
,
CORRENS NICO
,
TUMPACH GREGOR
,
KERSTAN FELIX
Year of Publication
06.05.2008
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KOMPAKT-SPEKTROMETER
by
TUMPACH, GREGOR
,
CORRENS, NICO
,
KERSTAN, FELIX
,
KLARNER
,
ULLRICH
Year of Publication
15.02.2008
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COMPACT SPECTROMETER
by
TUMPACH, GREGOR
,
CORRENS, NICO
,
KERSTAN, FELIX
,
KLARNER
,
ULLRICH
Year of Publication
16.01.2008
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Pressure compensating device for optical apparatus
by
Correns, Nico
,
Klarner
,
Ullrich
,
Hoyme, Werner
,
Kerstan, Felix
Year of Publication
25.07.2006
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Pressure compensating device for optical apparatus
by
KLARNER ULLRICH
,
CORRENS NICO
,
HOYME WERNER
,
KERSTAN FELIX
Year of Publication
25.07.2006
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Compact spectrometer
by
KLARNER ULLRICH
,
CORRENS NICO
,
TUMPACH GREGOR
,
KERSTAN FELIX
Year of Publication
29.06.2006
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Microscope
by
WAHL HUBERT
,
KLARNER ULLRICH
,
DIETZSCH LEANDER
,
TANDLER HANS
Year of Publication
29.06.2006
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COMPACT SPECTROMETER
by
TUMPACH, GREGOR
,
CORRENS, NICO
,
KERSTAN, FELIX
,
KLARNER
,
ULLRICH
Year of Publication
02.11.2005
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AGENCEMENT POUR LA FIXATION EN POSITION D'UN COMPOSANT OPTIQUE
by
KLARNER ULLRICH
,
CORRENS NICO
,
HOYME WERNER
,
KERSTAN FELIX
Year of Publication
28.10.2005
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GASPROBENBEHÄLTER FÜR EINEN GASANALYSATOR
by
CORRENS, NICO
,
KERSTAN, FELIX
,
KLARNER
,
ULLRICH
,
HOYME, WERNER
Year of Publication
15.05.2005
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Gas sample vessel for a gas analyzer
by
Kerstan, Felix
,
Hoyme, Werner
,
Correns, Nico
,
Klarner
,
Ullrich
Year of Publication
03.05.2005
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Gas sample vessel for a gas analyzer
by
KLARNER ULLRICH
,
CORRENS NICO
,
HOYME WERNER
,
KERSTAN FELIX
Year of Publication
03.05.2005
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Gas sample container for a gas analyser
by
CORRENS, NICO
,
KERSTAN, FELIX
,
KLARNER
,
ULLRICH
,
HOYME, WERNER
Year of Publication
27.04.2005
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Lens holder in optical system incorporates an air gap, tubular mounting, positioning and fixing mechanisms, thrust surface and optical axis
by
BENEDIX, GUENTHER
,
HENGST, HENDRIK
,
RIENECKER, STEFFEN
,
KLARNER
,
ULLRICH
,
LEITEL, ARMIN
Year of Publication
19.05.2004
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Pressure compensating device for optical apparatus
by
Klarner
,
Ullrich
,
Correns, Nico
,
Hoyme, Werner
,
Kerstan, Felix
Year of Publication
12.02.2004
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Pressure compensating device for optical apparatus
by
KLARNER ULLRICH
,
CORRENS NICO
,
HOYME WERNER
,
KERSTAN FELIX
Year of Publication
12.02.2004
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PRESSURE COMPENSATING DEVICE FOR OPTICAL APPARATUS
by
CORRENS, NICO
,
KERSTAN, FELIX
,
KLARNER
,
ULLRICH
,
HOYME, WERNER
Year of Publication
02.01.2004
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