Simulation of topography evolution and damage formation during TEM sample preparation using focused ion beams
Boxleitner, W., Hobler, G., Klüppel, V., Cerva, H.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.2001)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.2001)
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