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Year of Publication 21.09.2017
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Year of Publication 22.12.2016
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Year of Publication 24.11.2016
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Year of Publication 30.08.2012
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Year of Publication 12.03.2015
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Year of Publication 02.09.2010
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Year of Publication 07.02.2013
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SEMICONDUCTOR INSPECTING APPARATUS
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Year of Publication 04.03.2011
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Year of Publication 09.12.2010
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Year of Publication 09.12.2010
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The Study of Microscopic Wear Mechanism by a SEM-Tribosystem : Transition of Microscopic Wear Mode during Repeated Sliding Friction
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Published in Transactions of the Japan Society of Mechanical Engineers Series C (1991)
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SEMICONDUCTOR INSPECTING APPARATUS
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Year of Publication 30.12.2009
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Year of Publication 30.12.2009
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PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
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Year of Publication 28.03.2002
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
KAWADA, HIROKI, YAMANE, MIYUKI, HAYASHI, TAKAYUKI, YAMASHITA, MANUBU, KITSUNAI, HIROYUKI
Year of Publication 27.09.2001
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Year of Publication 27.09.2001
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DISTURBANCE-FREE, RECIPE-CONTROLLED PLASMA PROCESSING SYSTEM, AND METHOD THEREOF FOR SUPPRESSING INFLUENCES DUE TO DISTURBANCE
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Year of Publication 21.02.2005
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Year of Publication 21.02.2005
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