Microfabrication of surface acoustic wave devices with AlN thin film deposited on half‐inch quartz wafer
Nagano, Asahi, Kitamura, Kanato, Noda, Shuichi, Murakami, Sunao, Iguchi, Kohei, Khumpuang, Sommawan, Hara, Shiro
Published in Electrical engineering in Japan (01.12.2022)
Published in Electrical engineering in Japan (01.12.2022)
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