Structure and Expansion Characteristics of Laser Ablation Tin Plasma into a Vacuum
Zhu, Qiushi, Yamada, Junzaburo, Kishi, Nozomu, Hosokai, Tomonao, Watanabe, Masato, Okino, Akitoshi, Horioka, Kazuhiko, Hotta, Eiki
Published in Japanese Journal of Applied Physics (01.05.2010)
Published in Japanese Journal of Applied Physics (01.05.2010)
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Journal Article
Development of Xe and Sn discharge EUV light source
Kishi, N, Iizuka, N, Jiang, F, Orishimo, S, Kawamura, T, Horioka, K, Watanabe, M, Okino, A, Hotta, E
Published in Journal of physics. Conference series (01.05.2008)
Published in Journal of physics. Conference series (01.05.2008)
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Journal Article
Behavior of laser assisted tin discharge EUV emitting plasma
Qiushi Zhu, Yamada, J., Kishi, N., Hosokai, T., Watanabe, M., Okino, A., Hotta, E.
Published in 2009 IEEE International Conference on Plasma Science - Abstracts (01.06.2009)
Published in 2009 IEEE International Conference on Plasma Science - Abstracts (01.06.2009)
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Conference Proceeding
Optical Observation of Gas Jet Z-pinch Discharge Produced Extreme Ultraviolet Light Source
Watanabe, Masato, Kishi, Nozomu, Iizuka, Naoya, Orishimo, Tetsuya, Fei, Jiang, Okino, Akitoshi, Hotta, Eiki
Published in 2007 IEEE 34th International Conference on Plasma Science (ICOPS) (01.06.2007)
Published in 2007 IEEE 34th International Conference on Plasma Science (ICOPS) (01.06.2007)
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Conference Proceeding
Optimization of a gas jet-type Z-pinch discharge EUV light source
Iizuka, Naoya, Kishi, Nozomu, Song, Inho, Sakamoto, Toshiro, Kobayashi, Yasunori, Mohanty, Smruti R., Watanabe, Masahito, Okino, Akitoshi, Hotta, Eiki
Published in 2006 International Symposium on Discharges and Electrical Insulation in Vacuum (01.09.2006)
Published in 2006 International Symposium on Discharges and Electrical Insulation in Vacuum (01.09.2006)
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Conference Proceeding
Pinch dynamics of the 13.5 nm EUV-emitting plasma in a LA-DPP source
Qiushi Zhu, Yamada, J., Kishi, N., Hosokai, T., Watanabe, M., Okino, A., Horioka, K., Hotta, E.
Published in 2011 Academic International Symposium on Optoelectronics and Microelectronics Technology (01.10.2011)
Published in 2011 Academic International Symposium on Optoelectronics and Microelectronics Technology (01.10.2011)
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Conference Proceeding