Laser-induced extreme UV radiation sources for manufacturing next-generation integrated circuits
Borisov, V M, Vinokhodov, A Yu, Ivanov, A S, Kiryukhin, Yu B, Mishchenko, V A, Prokof'ev, A V, Khristoforov, O B
Published in Quantum electronics (Woodbury, N.Y.) (31.10.2009)
Published in Quantum electronics (Woodbury, N.Y.) (31.10.2009)
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Journal Article
Creation and investigation of powerful EUV sources (λ ≈ 13.5 nm)
Borisov, V. M., Borisova, G. N., Vinokhodov, A. Yu, Ivanov, A. S., Kiryukhin, Yu. B., Mishchenko, V. A., Prokofiev, A. V., Khristoforov, O. B.
Published in Plasma physics reports (01.03.2010)
Published in Plasma physics reports (01.03.2010)
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Journal Article
High-power gas-discharge EUV source
Borisov, V. M., Vinokhodov, A. Yu, Ivanov, A. S., Kiryukhin, Yu. B., Mironov, S. V., Mishchenko, V. A., Prokof’ev, A. V., Khristoforov, O. B.
Published in Plasma physics reports (01.10.2002)
Published in Plasma physics reports (01.10.2002)
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Journal Article
Changes in the characteristics of an electric-discharge XeF laser on increase in pressure
Baranov, V Yu, Borisov, V M, Kiryukhin, Yu B, Stepanov, Yu Yu
Published in Soviet journal of quantum electronics (31.10.1978)
Published in Soviet journal of quantum electronics (31.10.1978)
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Journal Article
Increase in the repetition frequency of XeCl laser pulses to 1 kHz
Baranov, V Yu, Borisov, V M, Vinokhodov, A Yu, Vysikaĭlo, F I, Kiryukhin, Yu B
Published in Soviet journal of quantum electronics (30.04.1984)
Published in Soviet journal of quantum electronics (30.04.1984)
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Journal Article
High-power EUV (13.5 nm) light source
Borisov, Vladimir M, Borisova, Galina N, Vinokhodov, Aleksandr Yu, Zakharov, S V, Ivanov, Aleksandr S, Kiryukhin, Yurii B, Mishchenko, Valentin A, Prokof'ev, Aleksandr V, Khristoforov, Oleg B
Published in Quantum electronics (Woodbury, N.Y.) (15.10.2010)
Published in Quantum electronics (Woodbury, N.Y.) (15.10.2010)
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Journal Article
Pulse-periodic surface discharge
Borisov, V M, Vysikaĭlo, F I, Kiryukhin, Yu B, Khristoforov, O B
Published in Soviet journal of quantum electronics (31.10.1983)
Published in Soviet journal of quantum electronics (31.10.1983)
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Journal Article
Establishment of a steady-state power level in a pulse-periodic excimer laser
Borisov, V M, Vysikaĭlo, F I, Vinokhodov, A Yu, Kiryukhin, Yu B
Published in Soviet journal of quantum electronics (31.10.1984)
Published in Soviet journal of quantum electronics (31.10.1984)
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Journal Article
Optimization of the average power of pulsed-periodic KrF and XeCl excimer lasers
Baranov, V Yu, Borisov, V M, Vysikaĭlo, F I, Kiryukhin, Yu B, Smirnov, N Ya
Published in Soviet journal of quantum electronics (30.09.1981)
Published in Soviet journal of quantum electronics (30.09.1981)
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Journal Article
Laser-induced extreme UV radiation sources for manufacturing next-generation integrated circuits
BORISOV, V. M, VINOKHODOV, A. Yu, IVANOV, A. S, KIRYUKHIN, Yu. B, MISHCHENKO, V. A, PROKOF'EV, A. V, KHRISTOFOROV, O. B
Published in Quantum electronics (Woodbury, N.Y.) (2009)
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Published in Quantum electronics (Woodbury, N.Y.) (2009)
Journal Article
Free-oscillation stimulated emission from an electric-discharge CO2 laser in the nanosecond range of pulse durations
Baranov, V Yu, Borisov, V M, Kiryukhin, Yu B, Kochetov, Igor' V, Pevgov, V G, Stepanov, Yu Yu
Published in Soviet journal of quantum electronics (31.05.1978)
Published in Soviet journal of quantum electronics (31.05.1978)
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Journal Article
Characteristics of the pulse-periodic regime of excimer lasers
Baranov, V Yu, Borisov, V M, Vinokhodov, A Yu, Vysikaĭlo, F I, Kiryukhin, Yu B
Published in Soviet journal of quantum electronics (31.03.1983)
Published in Soviet journal of quantum electronics (31.03.1983)
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Journal Article
Electrode effects in a pulse-periodic excimer laser
Arutyunyan, R V, Borisov, V M, Vinokhodov, A Yu, Kiryukhin, Yu B, Morozov, A N
Published in Soviet journal of quantum electronics (31.12.1986)
Published in Soviet journal of quantum electronics (31.12.1986)
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Journal Article