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Published in Microelectronic engineering (01.05.2007)
Published in Microelectronic engineering (01.05.2007)
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Published in Microelectronic engineering (01.09.2012)
Published in Microelectronic engineering (01.09.2012)
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Table for vacuum use guided with aerostatic bearing elements
Jackel, Christian, Peschel, Thomas, Risse, Stefan, Schubert, Gerhard, Kirschstein, Ulf-Carsten, Harnisch, Gerd, Schenk, Christoph, Bauer, René, Böhm, Michael
Year of Publication 30.05.2018
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Year of Publication 30.05.2018
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Aerostatic bearing assembly with allocated electrostatic pretensioning unit, in particular for vacuum application
SCHENK, CHRISTOPH, PESCHEL, THOMAS, SCHUBERT, GERHARD, KIRSCHSTEIN, ULF-CARSTEN, BAUER, RENÉ, HARNISCH, GERD, BÖHM, MICHAEL, RISSE, STEFAN, JACKEL, CHRISTIAN
Year of Publication 11.11.2015
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Year of Publication 11.11.2015
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Aerostatic bearing arrangement and associated electrostatic preloading unit, particularly for vacuum application
PESCHEL THOMAS, RISSE STEFAN, HARNISCH GERD, JACKEL CHRISTIAN, BAUER RENE, SCHUBERT GERHARD, KIRSCHSTEIN ULF-CARSTEN, BOEHM MICHAEL, SCHENK CHRISTOPH
Year of Publication 10.09.2013
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Year of Publication 10.09.2013
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Aerostatically guided table system for vacuum application
PESCHEL THOMAS, RISSE STEFAN, HARNISCH GERD, JACKEL CHRISTIAN, BAUER RENE, SCHUBERT GERHARD, KIRSCHSTEIN ULF-CARSTEN, BOEHM MICHAEL, SCHENK CHRISTOPH
Year of Publication 30.07.2013
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Year of Publication 30.07.2013
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Table guided by aerostatic bearing elements for vacuum application
PESCHEL THOMAS, RISSE STEFAN, HARNISCH GERD, JACKEL CHRISTIAN, BAUER RENE, SCHUBERT GERHARD, KIRSCHSTEIN ULF-CARSTEN, BOEHM MICHAEL, SCHENK CHRISTOPH
Year of Publication 18.09.2012
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Year of Publication 18.09.2012
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Table for vacuum use guided with aerostatic bearing elements
PESCHEL, THOMAS, SCHENK, CHRISTOPH, BAUER, RENE, SCHUBERT, GERHARD, BOEHM, MICHAEL, KIRSCHSTEIN, ULF-CARSTEN, HARNISCH, GERD, RISSE, STEFAN, JACKEL, CHRISTIAN
Year of Publication 29.09.2010
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Year of Publication 29.09.2010
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TABLE DEVICE GUIDED AEROSTATICALLY FOR VACUUM APPLICATION
PESCHEL THOMAS, RISSE STEFAN, HARNISCH GERD, JACKEL CHRISTIAN, BAUER RENE, SCHUBERT GERHARD, KIRSCHSTEIN ULF-CARSTEN, BOEHM MICHAEL, SCHENK CHRISTOPH
Year of Publication 03.06.2010
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Year of Publication 03.06.2010
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Aerostatically Guided Table System for Vacuum Application
PESCHEL THOMAS, RISSE STEFAN, HARNISCH GERD, JACKEL CHRISTIAN, BAUER RENE, SCHUBERT GERHARD, KIRSCHSTEIN ULF-CARSTEN, BOEHM MICHAEL, SCHENK CHRISTOPH
Year of Publication 20.05.2010
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Year of Publication 20.05.2010
Patent
STATIC PRESSURE GAS BEARING DEVICE PARTICULARLY FOR VACUUM USE AND RELATED ELECTROSTATIC PRE-LOAD UNIT
PESCHEL THOMAS, RISSE STEFAN, HARNISCH GERD, JACKEL CHRISTIAN, BAUER RENE, SCHUBERT GERHARD, KIRSCHSTEIN ULF-CARSTEN, BOEHM MICHAEL, SCHENK CHRISTOPH
Year of Publication 25.03.2010
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Year of Publication 25.03.2010
Patent
AEROSTATIC BEARING ARRANGEMENT AND ASSOCIATED ELECTROSTATIC PRELOADING UNIT, PARTICULARLY FOR VACUUM APPLICATION
PESCHEL THOMAS, RISSE STEFAN, HARNISCH GERD, JACKEL CHRISTIAN, BAUER RENE, SCHUBERT GERHARD, KIRSCHSTEIN ULF-CARSTEN, BOEHM MICHAEL, SCHENK CHRISTOPH
Year of Publication 11.03.2010
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Year of Publication 11.03.2010
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TABLE GUIDED BY AEROSTATIC BEARING ELEMENTS FOR VACUUM APPLICATION
PESCHEL THOMAS, RISSE STEFAN, HARNISCH GERD, JACKEL CHRISTIAN, BAUER RENE, SCHUBERT GERHARD, KIRSCHSTEIN ULF-CARSTEN, BOEHM MICHAEL, SCHENK CHRISTOPH
Year of Publication 15.10.2009
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Year of Publication 15.10.2009
Patent
System for receiving and retaining a substrate
DAMM CHRISTOPH, PESCHEL THOMAS, RISSE STEFAN, KIRSCHSTEIN ULF-CARSTEN
Year of Publication 12.11.2002
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Year of Publication 12.11.2002
Patent
System for receiving and retaining a substrate
Kirschstein, Ulf-Carsten, Risse, Stefan, Damm, Christoph, Peschel, Thomas
Year of Publication 12.11.2002
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Year of Publication 12.11.2002
Patent
EXPOSURE APPARATUS WITH HOLDING DEVICE FOR A SUBSTRATE
SCHUBERT, GERHARD, GUYENOT, VOLKER, KIRSCHSTEIN, ULF-CARSTEN, HARNISCH, GERD, RISSE, STEFAN, KALKOWSKI, GERHARD
Year of Publication 19.10.2005
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Year of Publication 19.10.2005
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Acceptance and holding system for a substrate
PESCHEL, THOMAS, KIRSCHSTEIN, ULF-CARSTEN, DAMM, CHRISTOPH, RISSE, STEFAN
Year of Publication 21.04.2001
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Year of Publication 21.04.2001
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