Accurate characterization of SiO2 thin films using surface acoustic waves
Knapp, Matthias, Lomonosov, Alexey M., Warkentin, Paul, Jager, Philipp M., Ruile, Werner, Kirschner, Hans-Peter, Honal, Matthias, Bleyl, Ingo, Mayer, Andreas P., Reindl, Leonhard M.
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.04.2015)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.04.2015)
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Journal Article
Accurate characterization of SiO sub(2) thin films using surface acoustic waves
Knapp, Matthias, Lomonosov, Alexey M, Warkentin, Paul, Jager, Philipp M, Ruile, Werner, Kirschner, Hans-Peter, Honal, Matthias, Bleyl, Ingo, Mayer, Andreas P, Reindl, Leonhard M
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.04.2015)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.04.2015)
Get full text
Journal Article