Characterization of polysilicon-encapsulated local oxidation
Roth, S.S., Ray, W.J., Mazure, C., Cooper, K., Kirsch, H.C., Gunderson, C.D., Ko, J.
Published in IEEE transactions on electron devices (01.05.1992)
Published in IEEE transactions on electron devices (01.05.1992)
Get full text
Journal Article
Process limitation and device design tradeoffs of self-aligned TiSi/sub 2/ junction formation in submicrometer CMOS devices
Lu, C.-Y., Sung, J.J., Liu, R., Tsai, N.-S., Sing, R., Hillenius, S.J., Kirsch, H.C.
Published in IEEE transactions on electron devices (01.02.1991)
Published in IEEE transactions on electron devices (01.02.1991)
Get full text
Journal Article
Scaling of poly-encapsulated LOCOS for 0.35 /spl mu/m CMOS technology
Kenkare, P.U., Mazure, C., Hayden, J.D., Pfiester, J.R., Ko, J., Kirsch, H.C., Ajuria, S.A., Crabtree, P., Vuong, T.
Published in IEEE transactions on electron devices (01.01.1994)
Published in IEEE transactions on electron devices (01.01.1994)
Get full text
Journal Article
Polysilicon encapsulated local oxidation
Roth, S.S., Ray, W., Mazure, C., Kirsch, H.C.
Published in IEEE electron device letters (01.03.1991)
Published in IEEE electron device letters (01.03.1991)
Get full text
Journal Article
Scaling of poly-encapsulated LOCOS for 0.35 μm CMOS technology
KENKARE, P. U, MAZURE, C, HAYDEN, J. D, PFIESTER, J. R, KO, J, KIRSCH, H. C, AJURIA, S. A, CRABTREE, P, VUONG, T
Published in IEEE transactions on electron devices (1994)
Published in IEEE transactions on electron devices (1994)
Get full text
Journal Article
The SCC BJT: a high-performance bipolar transistor compatible with high-density deep-submicrometer BiCMOS SRAM technologies
Taft, R.C., Lage, C.S., Hayden, J.D., Kirsch, H.C., Lin, J.-H., Denning, D.J., Shapiro, F.B., Bockelman, D.E., Camilleri, N.
Published in IEEE transactions on electron devices (01.07.1995)
Published in IEEE transactions on electron devices (01.07.1995)
Get full text
Journal Article
PELOX integrated PBL
Roth, S.S., Cooper, K.J., Kirsch, H.C., Ray, W., Hendrix, L., Simon, G.
Published in IEEE transactions on semiconductor manufacturing (01.08.1993)
Published in IEEE transactions on semiconductor manufacturing (01.08.1993)
Get full text
Journal Article
Recessed polysilicon encapsulated local oxidation
Cooper, K.J., Roth, S.S., Ray, W., Kirsch, H.C., Ko, J.
Published in IEEE electron device letters (01.10.1991)
Published in IEEE electron device letters (01.10.1991)
Get full text
Journal Article
A new toroidal TFT structure for future generation SRAMs
Hayden, J.D., Cooper, K.J., Roth, S.S., Kirsch, H.C.
Published in IEEE International Electron Devices Meeting, 1993 (1993)
Published in IEEE International Electron Devices Meeting, 1993 (1993)
Get full text
Conference Proceeding
Journal Article
Technology for the fabrication of A 1 MB CMOS DRAM
Yaney, D.S., Desko, J.C., Kelly, M.J., Lancaster, L.T., Lin, A.M.-R., Manocha, A.S., McGuire, T.K., Peiffer, F.R., Kirsch, H.C.
Published in 1985 International Electron Devices Meeting (1985)
Published in 1985 International Electron Devices Meeting (1985)
Get full text
Conference Proceeding