Properties of SiO2 films formed by oxygen implantation into silicon
Kirov, K.I., Atanasova, E.D., Alexandrova, S.P., Amov, B.G., Djakov, A.E.
Published in Thin solid films (01.01.1978)
Published in Thin solid films (01.01.1978)
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Journal Article
Plasma deposition of Si3N4 layers
Kirov, K.I., Georgiev, S.S., Pantchev, B.G., Koprinarova, J.B.
Published in Thin solid films (01.01.1980)
Published in Thin solid films (01.01.1980)
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Journal Article